ym vd ym vs series evacuation systems 1 580 to 20 000 l min YM-VD, YM-VS Series Evacuation Systems (1,580 to 20,000 l/min)
Origin: Japan
vs series oil rotary vacuum pumps 2 500 to 4 800 l min VS Series Oil Rotary Vacuum Pumps (2,500 to 4,800 l/min)
Origin: Japan
pks series oil rotary vacuum pumps 1 600 to 7 000 l min PKS Series Oil Rotary Vacuum Pumps (1,600 to 7,000 l/min)
Origin: Japan
prc a series mechanical booster pumps PRC-A Series Mechanical Booster Pumps
Origin: Japan
utm fw fh series digitally controlled magnetic levitation turbo molecular pumps UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
Origin: Japan
organic material Organic Material
Origin: Japan
service 2Pump Servicing
Our field support division consists of trained engineers/technicians with fully equipped on-site service vacuum pumps, capable of providing a full service for many kinds of vacuum equipments and vacuum systems including annual over haul, maintenance, repair and refurbish service. Our engineers are fully trained to carry out servicing and repairs to all types vacuum pumps. We can provide service not only for ULVAC pumps but also for many other makers. We aim at becoming one of the leading...
service 3System Installation
ULVAC offers a complete installation service. We are able to install many kinds of vacuum systems such as Sputtering, PVD/CVD, Etching systems and so on. We provide a complete installation service, including system control and training course for customer s staffs. Staff of Engineers and Scientists The technical staff of scientists and engineers at ULVAC Technologies, Inc. in Methuen, MA is available to help customers meet the challenges of the most difficult Deep Oxide Etch requirements....
service 1Target Bonding / Parts Cleaning

We provide Part Cleaning and Target Bonding services for a wide range of vacuum equipments and systems.


ULVAC Vietnam is a Representative Office of ULVAC SINGAPORE PTE LTD.

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Company news Career / Recruitment
Low temperature PZT Sputtering Technology
Starting soon to sell “MILA-700AR”, Mini Lamp Annealing System, without using cooling water
ULVAC Awarded the First Kanagawa Award for the Prevention of Global Warming in the Greenhouse Gas Reduction Technology Development Category with ...
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