Small Dry Vacuum Pump DA/DAp/DAT Series

This is a vacuum pump that evacuates by the reciprocating motion of a rubber thin film (diaphragm). Simple structure and easy handling. DA series is a standard type.


  • Pump structure makes maintenance easy and provides an oil-free vacuum environment
  • Various pumping speeds and stage arrangements are selectable depends on your required
    pressure and pumping volume


  • Vacuum chucks, wafer and tip handling devices
  • Vacuum tweezers, medical appliances
  • Printing equipment
  • Automatic packing machines
  • Optical appliances