Oil rotary vacuum pump
VD series is a direct-drive oil rotary pump with high efficiency (IE3) multi-voltage motor fully developed by ULVAC. This dual stage rotary vane mechanical vacuum achieves lower ultimate pressure. Design optimization realized quiet operation and so this pump is suitable for a wide range of applications.
Features
- High efficiency (IE3) multiple voltage motor fully developed by ULVAC
A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V. - Forced oil circulation system
Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum. - Various options are available for special application
3 types, type A, B and H, are available in addition to standard type for special application.
applications
- Evaporation, sputtering, and ion plating
- Analytical instrument and leak test system
- Gas exchange, liquid filling
- Vacuum dry, freeze dry, vacuum deaeration, and vacuum insulation
- Vacuum chuck and vacuum molding
- Other vacuum equipments
specifications
| Model | VD30C | VD40C | VD60C | VD90C | |||||||
| Designed pumping speed m3/h /L/min / cfm | 50 Hz | 30/500/17.66 | 40/670/23.54 | 60/1000/35.31 | 90/1500/52.97 | ||||||
| 60 Hz | 36/600/21.29 | 48/800/28.25 | 72/1200/42.38 | 108/1800/63.57 | |||||||
| Ultimate pressure Pa/Torr/mbar *1 | GP close | 0.67/5×10-3/6.7×10-3 | |||||||||
| GP open | 6.7/5×10-2/6.7×10-2 | ||||||||||
| Maximum water vapor tolerance Pa/Torr/mbar | GP open | 50 Hz | 1300/9.8/13.0 | 1360/10.2/13.6 | 1320/9.9/13.2 | 970/7.3/9.7 | |||||
| 60 Hz | 1400/10.5/14.0 | 1760/13.2/17.6 | 2800/21.0/28.0 | 2820 *2/21.2/28.2 | |||||||
| Maximum water vapor capacity g/h | GP open | 50 Hz | 190 | 270 | 430 | 480 | |||||
| 60 Hz | 250 | 410 | 1100 | 1650 *2 | |||||||
| Motor | Type | Totally enclosed fan cooled 3 phase induction motor | |||||||||
| Energy efficiency class | IE3 | ||||||||||
| kw/HP(number of poles) | 1.5(4) | 1.5(4) | 2.2(4) | 3.7(4) | |||||||
| Voltage *4 | 50 Hz | 200～240 / 380～415 | |||||||||
| 60 Hz | 200～240 / 380～460 | ||||||||||
| Oil | ULVOIL R-7 | ||||||||||
| Oil capacity L | 1.0～2.5 | 2.5～4.0 | |||||||||
| Cooling method | Air cooled | ||||||||||
| Inlet | VG40 equivalency / KF40 (optional) | VG50 equivalency / KF50 (optional) | |||||||||
| Outlet | VG40 equivalency / KF40 (optional) | ||||||||||
| Weight kg | 58 | 60 | 90 | 113 | |||||||
| External dimensions W×D×H mm | 210×660×324 | 210×680×324 | 280×761×371 | 280×831×371 | |||||||
| Applicable standard | CE | ||||||||||
| Standard accessory | A dose of oil, a set of manual | ||||||||||
| Recommended oil mist trap (Optional) *5 | TM201: for low load operation TM401: for high load operation | TM401: for low load operation TM-2: for high load operation | |||||||||
| Options | Oil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application (spec A, B and H) | ||||||||||
*1 Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured with a McLeod vacuum gauge.)
*2 VD90C is not allowed the continuous operation in the inlet pressure at 1,000Pa or more. VD90C maximum water vapor tolerance / maximum water vapor capacity (in the continuous operation) : 1000Pa / 600g/h
*3 Increased safety explosion-resistant motor and pressure proof explosion-resistant motor are available as an option.
*4 Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.
*5 High load operation means repeat pumping down between atmospheric pressure and vacuum in short term or long time operation at 10,000 Pa (75 Torr) or higher.
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ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam