SME-200E is cluster type Sputtering system for research and development and production purpose.
Substrate size up to Φ200mm.
Process chamber up to three process chamber can be equipped.
Available for various application-specific process modules.
Substrate heating mechanism, simultaneous deposition and revolved deposition are available.
ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam
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