R&D Equipment

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R&D Equipment

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Innovative and advanced vacuum technologies to blaze a trail for the future. ULVAC has been providing all kinds of industries with vacuum technology based products and materials essential for them under the basic managerial philosophy of “aiming at contributing to the evolution of industries and sciences by using vacuum technologies and all peripheral technologies.

Rapid Thermal Annealers

This system is a Mini Lamp Annealer that enables the heat treatment up to 50mm square size samples.

The QHC series is a high-speed heating and cooling system, a combination of an Infrared Gold Image Furnace and temperature controller…

The VHC series is equipped with vacuum pump system and Pirani vacuum gauge as well as the features of QHC series.

This desktop ultra-high temperature annealing system achieves high reflection efficiency by heating in a focused manner precious materials like SiC and other small materials with high melting points.

A compact spot focused Infrared Gold Image Furnace capable of heating up to 1800 °C. This furnace can be used for zone melting and basic SiC power device experiments.

A simplified system with an Infrared Gold Image Furnace and a quartz chamber.A low-cost heating system consist of an Infrared Gold Image Furnace and quartz chamber including a sample holder.

Thermoelectric Testers

A simplified system with an Infrared Gold Image Furnace and a quartz chamber. A low-cost heating system consist of an Infrared Gold Image Furnace and quartz chamber including a sample holder.

A series corresponding to special specifications for the properties of various thermoelectric materials and thin films

STPM-1000 is used for evaluating Seebeck coefficient and thermal conductivity simultaneously. Simple evaluation of thermoelectric materials is possible by simultaneous evaluations of seebeck coefficient and thermal conductivity.

Measure thermoelectric conversion efficiency for thermoelectric material alone and a pair of thermoelectric material

Property evaluations of thermoelectric generator modules

Thermal conductivity evaluations of various films in the surface direction

Thermal conductivity measurements of a wide variety of materials from polymers to metals. 

Capable of easily evaluating thermal conductivity of nano-thin films.

Rapid Heating & Cooling IR Furnace

Auger Electron Spectroscopy / AES,SAM

Time-of-Flight SIMS / TOF-SIMS

Dynamic SIMS / D-SIMS

Sheet Steel Annealing Simulator

ARC Plasma Deposition