ULVAC Vietnam Representative Office

sputter ion pump pst series with controller

Sputter ion pumps are used to create ultra-high vacuum for various analyzers and accelerators. ULVAC's sputter ion pumps aredesigned to apply new elements and optimize magnetic fields for improving evacuation characteristics at ultra-high and extremely high vacuum.

Features

  • Available for ultimate pressure (10-9Pa order) ULVAC achieved the order with
    test dome complying with ISO standards.
  • Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
    (compared with the ULVAC’s conventional pumps)
  • High pumping speed attained the ultra-high vacuum
  • Pumping down to ultra-high vacuum in a short period of time
  • Top-notch pumping characteristics in ultra high vacuum
    (discharging maintained down to the ultra-high vacuum)

applications

  • Accelerators
  • Electron microscopes
  • Electron drawing device
  • Precision analyzers which dislike vibration

specifications

ModelPST-030CUPST-030AUPST-050CUPST-050AUPST-100CXPST-100AX
Target gasStandard gasInert gasStandard gasInert gasStandard gasInert gas
Pumping speed*
(Regenerating
evacuation speed)
0.03m3/s
(N2 gas
pumping)
0.013m3/s
(Ar gas
pumping)
0.045m3/s
(N2 gas
pumping)
0.016m3/s
(Ar gas
pumping)
0.10m3/s
(N2 gas
pumping)
0.05m3/s
(Ar gas
pumping)
Ultimate pressure10-9Pa
Operating pressure*3<8.0×10-3Pa<5.0 x 10-3Pa
Inner volume0.67 X 10-3m31.3×10-3m33.3×10-3m3
Element numberCU sell×1AU sell×1式CU sell×1AU sell×1CX sell×1AX sell×1
Connection flange typeUFC070UFC114UFC152
Applied voltageDC+7.5kV
Power for
heater
Single phaseNo settingAC200V, 300WAC200V, 320W
Bake-out temparature250℃
Weight9.5 kg12kg37kg
DimensionW x H x D103×183×187 mm153×204×241mm155×336×340mm
Operating
environment
Temparature5~40℃
Humidity85% or less(without condensation)
Pump fixing bolt hole4 points-M5
Depth 10mm
4 points-M8
Depth 6mm
Recommended controllerGST-07L-B

* Value when using GST-07L.

 

 

ModelPST-110AUPST-200CXIIPST-200AXIIPST-400CXIIPST-400AXII
Target gasStandard gasStandard gasInert gasStandard gasInert gas
Pumping speed*
(Regenerating
evacuation speed)
0.11m3/s
(N2 gas
pumping)
0.2m3/s
(N2 gas
pumping)
0.02m3/s
(Ar gas
pumping)
0.36m3/s
(N2 gas
pumping)
0.19m3/s
(Ar gas
pumping)
Ultimate pressure10-9Pa10-10Pa
Operating pressure*3<4.5×10-3Pa<3.8×10-3Pa<3.0×10-3Pa
Inner volume6.5×10-3m311×10-3m314×10-3m3
Element numberAU sellx1CX sell×2AX sell×2CX sell×4AX sell×4
Connection flange typeUFC152UFC203
Applied voltageDC+7.5kV
Power
for heater
Single phaseNo settingAC200V, 600WAC200V, 800W
Bake-out temparature250℃
Weight36.5kg65kg124kg
DimensionW x H x D171×387×293mm296×361×376mm296×544×376mm
Operating
environment
Temparature5~40℃
Humidity85% or less(without condensation)
Pump fixing bolt hole4 points-M6
Depth 15mm
4 points-M8
Depth 15mm
6 points-M8
Depth 15mm
Recommended controllerGST-07L-B

* Value when using GST-07L.

 

Controller of PST series

ModelGST-07L-B
Input specificationInput voltage,
current
AC100~115V±10% ・ 50/60Hz~3.0A
AC200~240V±10% ・ 50/60Hz~1.5A
Leakage current6mA以下
Input voltage
reshuffing
Manual(Operation with the power supply inside DIP switch)
Output specificationRated voltageDC+7.5kV
Output currentRated currentLess than DC30mA
Output polarityPositive polarity
Output propertiesConstant voltage characteristic
Display methodDigital display (7-segment LEDs)
Display contentsOutput current1µA~30mA(Automatic selection of two ranges: mA, µA)
Output voltage0.0~7.5 kV DC
Pressure display1×10-8~1×10-2 Pa
1×10-10~1×10-4 mbar
Pressure set point2 points
Protection functionsError display/various protection functions are available
High voltage(HV) output shutdown(ERR. 0 to 8 light)
Restoration after power failureAutomatic restroration after power failure is available
when the HV-ON switch is ON.
External control functionsVarious input/output functions are available(with REMOTE connector),
RS-232C communication control is equipped.
Monitor terminalOutput of signals proportionate to 7-segment panel display,
DC 0 to 10V full scale for each range
Allowable load impedance 100kΩ or more.
REMOTE/LOCALSwitchable on the front control panel
Cooling methodForeced air cooling
WeightBody4.0kg
DimensionsW×H×D200 x 99 x 370 mm (excluding rack mounting fixtures)
Ambient operating
conditions
Temperature0 to 40℃
HumidityLess than 85% (not condensing)
Applicable standardCE, cTUVus

pumping speed curve

  • PST-030CU_AU

PST-030CU-AU_curve.png

  • PST-050CU_AUPST-050CU_curve.png
  • PST-100CX_AX

PST-100CX-AX_curve.png

  • PST-110AUPST-110AU_curve.png
  • PST-200CXII_AXIIPST-200CX-AX_curve.png
  • PST-400CXII_AXIIPST-400CX_curve.png
 

Dimension drawing

  • PST-030CU_AUPST-030_JE1.png
  • PST-050CU_AUPST-050_E.png
  • PST-100CX_AXPST-100_E.png
  • PST-110AUPST-110_JE.png
  • PST-200CXII_AXIIPST-200_E.png
  • PST-400CXII_AXIIPST-400_E.png