ULVAC Vietnam Representative Office

turbo molecular pump utm-fw/fh series

The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled and realized advantages such as high performance and reliability and energy savings. The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes. The UTM-FW series is wide range and high flow type and for high load process and middle~hard processes.

Features

  • There is not limitation to combine any power supply and pump main unit to change cable length because of using coupling free system and tuning free system.
  • Variable speed system marks it possible to change the pumping speed in the rang from 25% through 100%.
  • Excellent anti-corrosion surface treatment. Optional special surface treatments (e.g. Nickel plating + cation electro-deposition, special deposited film, aluminum anodization) are available as necessary.
  • Optional internal heating system to control rotor temperature and reduce adhesion of side reaction by-products.
  • Safety design with fracture energy absorption construction can reduce damage on vacuum system when trouble happened with the pumps.

applications

  • Main evacuation of middle to hard processes such as dry etching, CVD system, etc.

specifications

Wide range and high throughput modelsHigh back-pressure and high compression modelsInlet flange sizeN2pumping speed(L/s) *1 *2
UTM-6300FHVG5006300
UTM-3301FWUTM-3303FHVG3503300
UTM-2300FWVG3002730
VG2502230
ICF3052110
UTM-1400FWVG2501490
VG2001360
ICF2531300
UTM-1001FWUTM-1001FHVG2001000
ICF2531000
UTM-800FWUTM-800FHVG150810
ICF203740
UTM-480FWUTM-480FHVG150480
ICF203480
UTM-350FWUTM-350FHVG100350
ICF152330
*1Value measured in accordance with JVIS005 standard, or calculated value based on it
*2Protective mesh isn’t used.