ULVAC Vietnam Representative Office
VLH 시리즈 진공 밸브
ULVAC의 진공 밸브는 진공 분야에서 축적된 다양한 기술과 경험을 바탕으로 개발되었습니다. 대기압부터 초고진공까지 다양한 요구 사항에 대응할 수 있도록 폭넓은 제품 라인업을 제공합니다.
사양
| Model | VLH-SB |
| Maximum allowable differential pressure on valve plate (Positive pressure/counter pressure) MPa | 0.10 |
| Maximum allowable differential pressure in opening direction (Positive pressure/counter pressure) MPa | 0.10 |
| Plate seal | O-ring |
| Feedthrough | Bellows |
| Actuation | Manual |
| External leak rate*1 Pa・m3/s | ≦1.0E-10 |
| Internal leak rate*1 Pa・m3/s | ≦1.0E-10 |
| Operating pressure range (absolute pressure) Pa | Atm. ～ 1.0E-6 |
| Bakeout temperature (when stopping)*2 ℃ | Body：150*3， actuation：70 |
| Operating ambient temperature ℃ | 5～70 |
| Fluid temperature ℃ | 5～70 |
| Heating & cooling speed ℃/h | ≦30 |
| Operating ambient | Non-corrosive |
| Fluid | Non-corrosive |
| Compressed air to cylinder MPaG | ー |
| Warranted operation cycle*4 | 10,000 |
| Orientation | No limitation |
| Position indicator | ー |
| Material of major parts (Vacuum side) | Stainless steel 304 |
| Material of major parts (Atmosphere side) | Stainless steel 304, Aluminum-6061 (anodized aluminum) |
| Bellows material | Stainless steel 316L |
| Seal material (Vacuum side) | FKM |
| Grease (Vacuum side) | Any grease is not used |
| Attachment for lifting | None*5 |
| RoHS | Complied |
