How to Detect Ultra-Small Gas Leaks (< 10⁻⁹ mbar·L/s) in Semiconductor Vacuum Chambers
In the semiconductor industry, especially in Front-End processes such as Dry Etching, thin film deposition (CVD/ALD), and Ion Implantation, an Ultra-High Vacuum (UHV) environment is absolutely critical. Even a nano-scale gas leak smaller than 10⁻⁹ mbar·L/s can damage an entire wafer worth hundreds of thousands of dollars. In other words, this is an extremely tiny […]
Gas Leak Detection Technology
In modern manufacturing, even an invisible micro leak can lead to serious consequences—from electronic component failure and fuel system hazards to reduced lifespan of air conditioning systems. At ULVAC Vietnam, we provide advanced gas leak test technology that enables the detection of micro leaks, ensures product tightness, and enhances overall product quality. 1. What is […]
Operating Principle of Helium Leak Test
Today, industries such as EV batteries, semiconductors, and medical devices demand extremely high product hermeticity. Therefore, understanding the operating principle of helium-based leak testers is essential. This technology probes the physical behavior of gas flow rather than merely inspecting surfaces. As a result, it can accurately detect defects at the molecular level. Moreover, ULVAC’s HELIOT […]
AUTO LEAK TEST – AN ESSENTIAL TREND FOR EVERY PRODUCTION INDUSTRY
Everyone knows about checking regular leaks by hand, but another method that saves labor costs and time that is not well known in Vietnam is Auto Leak Test. DEFINE: Auto leak testing simply means that in the past you had to manually check each product and each location to see if there were any leaks, […]
