BẢO TRÌ BƠM TURBO

Turbomolecular Pumps (TMPs) are core equipment used to achieve ultra-high vacuum in modern production lines. During operation, if the pump shows signs such as prolonged startup time, overheating, vibration, unusual noises, unusual odors, or burn marks from the power supply, these are serious warning signs. Such conditions may indicate that internal pump components or the power supply have been damaged, or that deposits have accumulated inside the pump due to contamination.

Failure to carry out regular overhaul and maintenance can lead to significant risks:

• Product damage: If the pump suddenly seizes during operation, it may damage the entire batch of goods or products on the production line.

• Production downtime: A sudden pump failure can cause the entire production line to stop unexpectedly.

• Damage to related systems: A TMP failure may affect or damage the functions of other systems, such as vacuum chambers or connected equipment.

• Increased costs: Repair costs can increase significantly when multiple expensive components need to be replaced due to severe damage.

Manufacturer’s Recommended Maintenance Intervals:

• TMP overhaul interval: Every 2 years. (Depending on operating conditions, such as use in CVD or Etcher systems, the TMP may require an earlier overhaul even if 2 years have not yet elapsed.)

• Power supply overhaul interval: Every 5 years.

• Overhaul of the TMP air-cooling fan and power supply: After every 30,000 operating hours.