ULVAC Vietnam Representative Office

Oil rotary vacuum pump

VD series is a direct-drive oil rotary pump with high efficiency (IE3) multi-voltage motor fully developed by ULVAC. This dual stage rotary vane mechanical vacuum achieves lower ultimate pressure. Design optimization realized quiet operation and so this pump is suitable for a wide range of applications.

Features

  • High efficiency (IE3) multiple voltage motor fully developed by ULVAC
    A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V.
  • Forced oil circulation system
    Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum.
  • Various options are available for special application
    3 types, type A, B and H, are available in addition to standard type for special application.

applications

  • Evaporation, sputtering, and ion plating
  • Analytical instrument and leak test system
  • Gas exchange, liquid filling
  • Vacuum dry, freeze dry, vacuum deaeration, and vacuum insulation
  • Vacuum chuck and vacuum molding
  • Other vacuum equipments
  •  

specifications

ModelVD30CVD40CVD60CVD90C
Designed pumping speed
m3/h /L/min / cfm
50
Hz
30/500/17.6640/670/23.5460/1000/35.3190/1500/52.97
60
Hz
36/600/21.2948/800/28.2572/1200/42.38108/1800/63.57
Ultimate pressure Pa/Torr/mbar *1GP close0.67/5×10-3/6.7×10-3
GP open6.7/5×10-2/6.7×10-2
Maximum water vapor tolerance Pa/Torr/mbarGP open50
Hz
1300/9.8/13.01360/10.2/13.61320/9.9/13.2970/7.3/9.7
60
Hz
1400/10.5/14.01760/13.2/17.62800/21.0/28.02820 *2/21.2/28.2
Maximum water vapor capacity g/hGP open50
Hz
190270430480
60
Hz
25041011001650 *2
MotorTypeTotally enclosed fan cooled 3 phase induction motor
Energy efficiency classIE3
kw/HP(number of poles)1.5(4)1.5(4)2.2(4)3.7(4)
Voltage *450
Hz
200~240 / 380~415
60
Hz
200~240 / 380~460
OilULVOIL R-7
Oil capacity L1.0~2.52.5~4.0
Cooling methodAir cooled
InletVG40 equivalency / KF40 (optional)VG50 equivalency / KF50 (optional)
OutletVG40 equivalency / KF40 (optional)
Weight kg586090113
External dimensions W×D×H mm210×660×324210×680×324280×761×371280×831×371
Applicable standardCE
Standard accessoryA dose of oil, a set of manual
Recommended oil mist trap (Optional) *5TM201: for low load operation
TM401: for high load operation
TM401: for low load operation
TM-2: for high load operation
OptionsOil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application (spec A, B and H)

*1 Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured with a McLeod vacuum gauge.)
*2 VD90C is not allowed the continuous operation in the inlet pressure at 1,000Pa or more. VD90C maximum water vapor tolerance / maximum water vapor capacity (in the continuous operation) : 1000Pa / 600g/h
*3 Increased safety explosion-resistant motor and pressure proof explosion-resistant motor are available as an option.
*4 Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.
*5 High load operation means repeat pumping down between atmospheric pressure and vacuum in short term or long time operation at 10,000 Pa (75 Torr) or higher.