HOT CATHODE GAUGE SH200 SERIES

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New series of transducer type “G-RTAN series Multi Ionization Gauge” that is capable of connection to differet type sensor heads. This product, which is a B-A type ionization vacuum gauge, can measure ultra-high vacuum.Improved to be more user-friendly taking over the concept of wide-range measurement and low running cost.

Features

ULVAC own concept: Capable of connection of different measurement range sensor heads according to application.
Compact: Significantly miniaturized compared to the previous series (56% reduction of controller volume). World’s smallest class.
High usability: Set point setting, condition check, etc. by connecting PC/Android.
Larger selection: EtherCAT spec to be available in addition to analog output spec and serial communication spec.
Filament life notification function: An advance warning can be made before the life of ionization vacuum gauge by watching flilament power.
Wide range measuremnt: Measurment from atmospheric pressure to ultra high vacuum (1 x 10⁺⁵ to 5 x 10^-8Pa) is possible (when using with an optional unit SWU10-R).
Precise atmospheric pressure sensing: Atmospheric pressure check for chamber open is available (when using with an optional unit SAU).

applications

Process control in high vaccuum range for vacuum equipments for semiconductors or electric devices.
Ultimate pressure check for in-line or batch type vacuum equipments which have many process chambers.
Pressure measurement for high vacuum or ultra-high vacuum equipments.

specifications

Model		SH200-A	SH200-R	HT200-E (scheduled for release)
Type		Analog output type	Serial communication type	EtherCAT communication type
Applicable ionization gauge sensor head		M-44(NW16), M-45(NW25), M-46(ICF070)
Connectable sensors		Multi ionization gauge SH200: 1 Pirani vacuum gauge sensor unit SWU10-R: 1 (option) Pressure sensro unit SAU: 1 (option)
Repeatability (N₂)		SH200 simple mode: ±2％
Sampling time		60 ms, 5x moving average
Value output		Output voltage: 0 to 10 VDC, LOG output: 0.75 V/1 decade Pressure conversion equation: V=7.25+0.75×(LogP-2) P=10^{(V-7.25)/0.75+2}
Update time		60msec
Control input signals		FIL ON/OFF、FIL　1/2、DEGAS ON/OFFOperates with open collector input, negative logic	–	–
Control output signals		Sensor error, Setpoint 1/2/3, Emission valid Watch of electric power of filament Rating: 24V_MAX、50mA_MAX Saturation voltage:1V	–	–
Communication type		–	RS232C/RS-485	EtherCAT
LED display		POWER: Power, ERROR LED (Blinking pattern and color change depending on each mode)
Emission current		1mA (1×10^-3Pa or lower), 10μA (1×10^-3Pa or higher)
Degas Method		Electron bombard type 1mA, 330V
Maximum pressure of sensor		2×10⁺⁵Pa (1.5 x 10⁺³ Torr, 2 x 10⁺³ mbar) (Absolute pressure) ＊Need separate measures as a capacity to resist pressure, such as flange and clamp
Internal volume of sensor		17cm³(M-44), 19cm³(M-45), 17cm³(M-46)
Operating temperature range		10 to 50℃ (50 to 122℉)
Operating humidity range		15 to 80% (not condensing)
Storage temperature		-20 to 65℃ (-4 to 149℉) (At non-energizing, not condensing)
IP rating		IP30
Power supply voltage		DC20 to 28V (Ripple, Noise 1% or less) Lower than 8W
Input/output connector		D-sub15-pin (M2.6 screw)
Weight		Sensor unit: approx. 280g, sensor head (M-44/45): 80g, (M-46): 300g
Dimension W x D x H		69mm×63mm×90mm (sensor unit only)
Applicable standard		CE
Option	Multi Ionization Gauge Sensor head	M-44(NW16), M-45(NW25), M-46(ICF070) Material of gas contacting sections: Filament 1, 2 -Ir/Y₂O₃ Other: PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plating
	Pirani Vacuum Gauge	SWU10-R *Previous model SPU also available
	Pirani Vacuum Gauge Sensor head	SWP-16(NW16), SWP-25(NW25), SWP-R1/8(R1/8), SWP-P18(Φ18 pipe end), SWP-P15(Φ15 pipe end), SWP-CF16(ICF034) Material of gas contacting sections : Filament-Pt, Other-BS/Ni plating, Ni, Solder
	Pressure switch	SAU(NW16) Material of gas contacting sections : SUS316L
	Unit cable	GUC-200P (for SWU10-R) ：0.5m, 1m, 2m GUC-200A (for SAU) ：0.5m, 1m, 2m
	Display unit	1CH：ISG1(DC24V)
	Display cable	Cable betweeen SH200 and desiplay unit 2m, 5m, 10m, 15m, 20m, 25m, 30m, 35m, 40m
	Connector	I/O connector (D-sub15-soket（M2.6mm screw))
	Others	Test certificate, Calibration certificate

SH200 series have three options; simple mode with a multi ionization gauge, combination mode with a multi ionization gauge and a pirani gauge (SWU10-R), and triple combination mode with a multi ionization gauge, a pirani gauge (SWU10-R) and a pressure switch (SAU)

Mode	SH200-A/SH200-R/SH200-E Simple mode	SH200-A/SH200-R/SH200-E ＋SWU10-R Combination mode	SH200-A/SH200-R/SH200-E ＋SWU10-R＋SAU Triple combination mode
Measurable pressure range	5.0×10^-8 to 1.0×10⁺¹Pa	5.0×10^-8to 1.0×10⁺⁵Pa	5.0×10^-8 to 1.0×10⁺⁵Pa
Accuracy	5.0×10^-8to 1.0×10⁺¹Pa： ±15%	5.0×10^-8to 1.0×10^-1Pa：±15% 4.0×10^-1 to 3.0×10⁺⁰Pa：±10～±15% 3.0×10⁺⁰ to 1.0×10⁺⁴Pa：±10% 1.0×10⁺⁴ to 1.0×10⁺⁵Pa：±20%	5.0×10^-8 to 4.0×10^-1Pa：±15% 4.0×10^-1 to 3.0×10⁺⁰Pa：±10～±15% 3.0×10⁺⁰ to 1.0×10⁺⁴Pa：±10% 1.0×10⁺⁴ to 3.0×10⁺⁵Pa：±3%F.S.(3.0×10⁺³Pa･Base temperature: 25℃)
Connection image
Measurable pressure range image	Triple combination can be used when “atmospheric pressure” check required to open chamber.