ULVAC Vietnam Representative Office


New series of transducer type “G-RTAN series Multi Ionization Gauge” that is capable of connection to differet type sensor heads. This product, which is a B-A type ionization vacuum gauge, can measure ultra-high vacuum.Improved to be more user-friendly taking over the concept of wide-range measurement and low running cost.


  • ULVAC own concept: Capable of connection of different measurement range sensor heads according to application.
  • Compact: Significantly miniaturized compared to the previous series (56% reduction of controller volume). World’s smallest class.
  • High usability: Set point setting, condition check, etc. by connecting PC/Android.
  • Larger selection: EtherCAT spec to be available in addition to analog output spec and serial communication spec.
  • Filament life notification function: An advance warning can be made before the life of ionization vacuum gauge by watching flilament power.
  • Wide range measuremnt: Measurment from atmospheric pressure to ultra high vacuum (1 x 10+5 to 5 x 10-8Pa) is possible (when using with an optional unit SWU10-R).
  • Precise atmospheric pressure sensing: Atmospheric pressure check for chamber open is available (when using with an optional unit SAU).


  • Process control in high vaccuum range for vacuum equipments for semiconductors or electric devices.
  • Ultimate pressure check for in-line or batch type vacuum equipments which have many process chambers.
  • Pressure measurement for high vacuum or ultra-high vacuum equipments.


(scheduled for release)
TypeAnalog output typeSerial communication typeEtherCAT communication type
Applicable ionization
gauge sensor head
M-44(NW16), M-45(NW25), M-46(ICF070)
Connectable sensorsMulti ionization gauge SH200: 1
Pirani vacuum gauge sensor unit SWU10-R: 1 (option)
Pressure sensro unit SAU: 1 (option)
Repeatability (N2)SH200 simple mode: ±2%
Sampling time60 ms, 5x moving average
Value outputOutput voltage: 0 to 10 VDC, LOG output: 0.75 V/1 decade
Pressure conversion equation: V=7.25+0.75×(LogP-2) P=10^{(V-7.25)/0.75+2}
Update time60msec
Control input signalsFIL ON/OFF、FIL 1/2、DEGAS ON/OFFOperates with open collector input, negative logic
Control output signalsSensor error, Setpoint 1/2/3, Emission valid
Watch of electric power of filament
Rating: 24VMAX、50mAMAX
Saturation voltage:1V
Communication typeRS232C/RS-485EtherCAT
LED displayPOWER: Power, ERROR LED (Blinking pattern and color change depending on each mode)
Emission current1mA (1×10-3Pa or lower), 10μA (1×10-3Pa or higher)
Degas MethodElectron bombard type 1mA, 330V
Maximum pressure of sensor2×10+5Pa (1.5 x 10+3 Torr, 2 x 10+3 mbar) (Absolute pressure)
*Need separate measures as a capacity to resist pressure, such as flange and clamp
Internal volume of sensor17cm3(M-44), 19cm3(M-45), 17cm3(M-46)
Operating temperature range10 to 50℃ (50 to 122℉)
Operating humidity range15 to 80% (not condensing)
Storage temperature-20 to 65℃ (-4 to 149℉) (At non-energizing, not condensing)
IP ratingIP30
Power supply voltageDC20 to 28V (Ripple, Noise 1% or less) Lower than 8W
Input/output connectorD-sub15-pin (M2.6 screw)
WeightSensor unit: approx. 280g, sensor head (M-44/45): 80g, (M-46): 300g
Dimension W x D x H69mm×63mm×90mm (sensor unit only)
Applicable standardCE
OptionMulti Ionization Gauge Sensor headM-44(NW16), M-45(NW25), M-46(ICF070)
Material of gas contacting sections: Filament 1, 2 -Ir/Y2O3
Other: PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plating
Pirani Vacuum GaugeSWU10-R *Previous model SPU also available
Pirani Vacuum Gauge Sensor headSWP-16(NW16), SWP-25(NW25), SWP-R1/8(R1/8), SWP-P18(Φ18 pipe end), SWP-P15(Φ15 pipe end), SWP-CF16(ICF034)
Material of gas contacting sections : Filament-Pt, Other-BS/Ni plating, Ni, Solder
Pressure switchSAU(NW16) Material of gas contacting sections : SUS316L
Unit cableGUC-200P (for SWU10-R) :0.5m, 1m, 2m
GUC-200A (for SAU) :0.5m, 1m, 2m
Display unit1CH:ISG1(DC24V)
Display cableCable betweeen SH200 and desiplay unit
2m, 5m, 10m, 15m, 20m, 25m, 30m, 35m, 40m
ConnectorI/O connector (D-sub15-soket(M2.6mm screw))
OthersTest certificate, Calibration certificate


SH200 series have three options; simple mode with a multi ionization gauge, combination mode with a multi ionization gauge and a pirani gauge (SWU10-R), and triple combination mode with a multi ionization gauge, a pirani gauge (SWU10-R) and a pressure switch (SAU)

Simple mode
Combination mode
Triple combination mode
Measurable pressure range5.0×10-8 to 1.0×10+1Pa5.0×10-8 to 1.0×10+5Pa5.0×10-8 to 1.0×10+5Pa
Accuracy5.0×10-8 to 1.0×10+1Pa:
5.0×10-8 to 1.0×10-1Pa:±15%
4.0×10-1 to 3.0×10+0Pa:±10~±15%
3.0×10+0 to 1.0×10+4Pa:±10%
1.0×10+4 to 1.0×10+5Pa:±20%
5.0×10-8 to 4.0×10-1Pa:±15%
4.0×10-1 to 3.0×10+0Pa:±10~±15%
3.0×10+0 to 1.0×10+4Pa:±10%
1.0×10+4 to 3.0×10+5Pa:±3%F.S.(3.0×10+3Pa・Base temperature: 25℃)
Connection imageSH200_S.pngSH200+SWU10-R.pngSH200+SWU10-R+SAU.png
Measurable pressure range imageSH200_i.png

Triple combination can be used when “atmospheric pressure” check required to open chamber.


Image of coneection with PC/smartphone



Application software “UL-MOBI”


Compatible devices

PCWindows 10 64 bit or later
SmartphoneAndroid 6 or later, USB TypeC

IO and analog GND are not isolated from the power GND.