ULVAC Vietnam Representative Office

Vacuum Oil

When the vacuum pump oil is operated over a long period of time, its deterioration contributes to poor performance. Regularly check to see if the oil has decreased or if it is dirty and refill or replace it.

SMR-100 / SMR-200

The vacuum pump oil SMR-100 has a low viscosity so that it has good startability even when it is cold. Change the oil as often as possible to achieve full pump performance.

—– Recommend list—–

  • G series
  • GLD Series
  • MBS series (SMR-200)

SO-M

The vacuum pump oil SMR-100 has a low viscosity so that it has good startability even when it is cold. Change the oil as often as possible to achieve full pump performance.Corrosion resistant pump Please use SO-M which has excellent corrosion resistance for GCD series. SO-M is a synthetic oil and is most suitable for the GCD series.

—– Recommend list—–

  • GCD series

OIL R-2

※Use only oils specified by us. If other oils are used, the pump performance will deteriorate or its life will shorten.
Note: When the vacuum pump oil is operated over a long period of time, its deterioration contributes to poor performance. Regularly check to see if the oil has decreased or if it is dirty and refill or replace it.

—– Recommend list—–

  • GHD series
  • GLD 40 Series

R-4/ R-7/R-80

R-4/ R-7, and R-80 are petroleum based oil for general use created for both cost effectiveness and quality through hydrogenation improvement and high vacuum rectification processing.

—– Recommend list—–

  • VD series
  • PKS series
  • VS Series
  • PVD Series