Vacuum Pump

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ULVAC vacuum pumps are developed based on abundant technology and experience in the vacuum field. In addition to Oil Rotary Vacuum Pumps, Dry Vacuum Pumps also have a lineup for all areas, conditions, and applications, including Roots, Diaphragms, and Pistons.

Dry Vacuum Pump

LS Series

High pumping speed and Low power consumption dry vacuum pump. LS series is selectable from 4 different pumping speed(120-1200m3/h) by depending on the application.

LR/HR/UR Series

ULVAC’s unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes

CR Series

Dry Vacuum Pump CR series Ver.B is an air-cooled roots type dry vacuum pump. IT complies with international standard(CE,cTUVus).

GR Series

Based on many years of experience with the LR/HR Series ULVAC has introduced the GR Series Dry Vacuum pump with a simple and clean design for general industrial applications.

Oil Rotary Vacuum Pump

VD/ VDN Series

VD series is a direct-drive oil rotary pump with high efficiency (IE3) multi-voltage motor fully developed by ULVAC. This dual stage rotary vane mechanical vacuum achieves lower ultimate pressure.

VS Series

VS series is a single-stage rotary vane oil rotary vacuum pump coupled with a direct-drive motor.

PVD Series

The PVD series are belt-driven compact rotary vacuum pumps with outstanding evacuation characteristics. They are used by a large number of ULVAC customers.

PKS Series

The PKS series models are extremely durable, large oil rotary vacuum pumps with very stable pumping characteristics. They are used in many applications, in areas ranging from the metal and automotive industries, to the chemical, pharmaceutical and food industries.

VS650A/750A Series

The VS650A and VS750 are single stage oil rotary vane pumps. Design to provide low vibration and noise, the VS series eliminates the need for costly facility work. Both air cooled and water cooled models are available depending on customer installation requirements.

Oil Mist Trap

When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumped. This oil-laden exhaust mist, which consists of tiny oil droplets, appears as “smoke” exiting from the exhaust port of the pump.

Mechanical Booster Pump

PRC Series

By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops.

PMB-D Series

The PMB series Ver. D is a wide use mechanical booster pump with multiple voltage motor (high efficiency). It is possible to run with air-cooled depending on use condition. And surface treatment and atmospheric operation type are selectable as option.

PMB-C Series

Turbo Molecular Pump

UTM-FW/ FH Series

The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled and realized advantages such as high performance and reliability and energy savings.

UTM-MI Series

Controller integrated turbo molecular pump with magnetic bearings saves wiring work and installation space.

UTM-B Series

The compound turbo molecular pump with the ceramic ball bearings,and has excellent compression ratio. Compact design by integrated controller design. Excellent high back pressure performance allows to use smaller backing pump.

YTP Series

YTP Series version B is a high vacuum pumping system with a ceramic ball bearing turbo molecular pump.Vacuum pumping from atmospheric pressure to high vacuum is possible.

Desktop YTP Series

YTP Series version B is a high vacuum pumping system with a ceramic ball bearing turbo molecular pump.Vacuum pumping from atmospheric pressure to high vacuum is possible.

Oil diffusion pump

PBL Series

ULVAC’s oil diffusion ejector pumps are generally used in industrial processes to provide high pumping speed. They are particularly well-suited for use in metallurgy, plastic coating and chemical manufacturing, where large quantities of gas have to be pumped away as quickly as possible.

PFL Series

PFL-type oil diffusion pump is designed and manufactured based on our extensive research and manufacturing experience.
It is used in many high-vacuum production facilities, and its practical performance is highly appreciated.

ULK Series

ULK-type oil diffusion pump is a compact high vacuum pump designed with high critical back pressure.It is used in a wide range of applications, from research to manufacturing line.

ion Pump

PST Series

Sputter ion pumps are one type of pump used to create　ultra-high vacuum, and are used in many analyzers and accelerators.ULVAC’s acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.

CRYO Pump

CRYO-U Series

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.