Oil Diffusion Pump pfl series
PFL-type oil diffusion pump is designed and manufactured based on our extensive research and manufacturing experience. It is used in many high-vacuum production facilities, and its practical performance is highly appreciated.
Features
- Excellent pumping speed
- Low back-streaming of the operating fluid
- Minimized power required and fluid capacity to ensure low operating cost
- Easy maintenance, easy use
- Reliable pump body construction
specifications Oil Diffusion Pump PFL Series
| Model | PFL-22 | PFL-36 | PFL-52 | ||||||||
| Pumping speed(L/sec) | 10000 | 34000 | 70000 | ||||||||
| Ultimate pressure(Pa)*1 | 3.0×10-4 | ||||||||||
| Maxium forepressure(Pa) | 16 | 6.7 | 16 | ||||||||
| Heating up time(min) | 40 | 60 | 60 | ||||||||
| Oil | ULVOIL D-11 | ||||||||||
| Oil capacity(L) | 5 | 13 | 27 | ||||||||
| Cooling water temperature(℃) | 19～25℃ | ||||||||||
| Water connections | Rc 1/2×2 | Rc 1/2×2 | Rc 1/2×4 Rc 3/8×2 | ||||||||
| Water capacity(L/min) | 12 | 38 | 50 | ||||||||
| Voltage | 200V / 3φ | ||||||||||
| Pump power(kW) | 8 | Start-Up 22 Normal 11 | Start-Up 45 Normal 30 | ||||||||
| Heater type | colled element | colled element | colled element | ||||||||
| Standard backing pump*2 | PMB-040C＋PKS-070 (PMB1200D＋PKS-030) | PMB-040C＋PKS-070 (PMB1200D＋PKS-070) (PMB2400D＋PKS-070) | PMB-060C＋PKS-070×2台 PMB2400D＋PKS-070 | ||||||||
| Dimensions(mm)*3 | A | 480 | 725 | 1000 | |||||||
| B | 630 | 1022 | 2000 | ||||||||
| H | 1330 | 1732 | 2845 | ||||||||
| Inlet | VG550 | VG900 | VG52相当inch | ||||||||
| Outlet | VG150 | VG250 | VG350 | ||||||||
| Weight(kg) | 290 | 650 | 1400 | ||||||||
| Oil level gage | ビューポート | ビューポート | ビューポート | ||||||||
| Themal switch option | 有り | 有り | 有り | ||||||||
| Themal switch operating temperature(℃) | 180 | 110 | 110 | ||||||||
Water Cooling Baffle(PFL)
| Model | BW-22 | BW-36 | BW-52 | ||||||||
| Conductance(L/sec) | 14000 | 54000 | 75000 | ||||||||
| Dimensions [mm] | D | φ680 | φ1065 | φ1480 | |||||||
| T | 101 | 113 | 165 | ||||||||
| t | 26 | 28 | 35 | ||||||||
| Water connections | Rc 3/8 | Rc 3/8 | Rc 1/2 | ||||||||
| Water capacity [L/min] | 3 | 5 | 5 | ||||||||
| Weight [kg] | 28 | 66 | 200 | ||||||||
Note:
*1 The ultimate pressure by an ionization gauge in the case of coolant temperature 20 degrees Ceisius.
*2 The backing pump chooses it for the maximum throughput of the diffusion ejector pump,but,in consideration of time of starting pressure,it is good to use a big backing pump.
*3 Please confirm other dimensions by CAD data placing in the ULVAC,Inc.website.
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ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam
5/5/42 Thanh Binh Street, Hai Duong Province, Vietnam