ULVAC Vietnam Representative Office

QULEE WITH YTP-H MODEL BGM2-101, BGM2-102, BGM2-201, BGM2-202, HGM2-302

A variation of Qulee, adding new features in response to customer needs. By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for process management and residual gas analysis.

Features

  • Excellent Cost Performance
    Provides gas analysis with an optional differentialpumping unit
  • Compact Design
    Utilizes standard vacuum unit model desktop YTP
  • Integrated Display Unit Design
    Provides visual data without need for a PC
  • Easy to Operate
    One-click function for easy operation, no complex procedures
  • Atmospheric Pressure Analysis
    Selectable maximum measurable pressures 3000Pa,500Pa,100Pa, 10Pa and 1Pa
    (22.5Torr, 3.75Torr, 0.75Torr, 7.5×10-2Torr and 7.5×10-3Torr/30mbar, 5mbar, 1mbar, 0.1mbar and 1.0×10-2mbar)
  • Select a Model Depending on your Application
    Select from the mass numbers 1 to 100 (BGM2-101/102), 1 to 200(BGM2-201/202), 1 to 300(HGM2-302)
  • Low noise
    43dB(A) or less at Ultimate pressure
  • Pressure indication
    Designed for easy integration of 2 vacuum gauges
  • Complete Leak Test Function
    Helium leak test, air leak test, leak up test
  • Qulee QCS Ver.4 (Ethernet compatible)
    Software included (Windows 7/8/10)

applications QULEE WITH YTP-H SERIES

  • Various types of gas analysis for research and development
  • Gas monitoring of PVD system during processing
    Residual gas analysis in PVD system
  • Residual gas analysis for high vacuum pumping equipment, etc.

specifications

Qulee main body

Select from BGM2-101 / 102 / 201 / 202, HGM2-302
*Refer to the product catalogue for the specification of Qulee

Software Qulee QCS Ver.4.0(Windows 7 / 8 / 10)

Max sampling pressure

Select from atmospheric pressure 3000Pa / 500Pa / 100Pa / 10Pa / 1Pa

Select from atmospheric pressure 22.5Torr / 3.75Torr / 0.75Torr / 7.5×10-2Torr / 7.5×10-3Torr

Select from atmospheric pressure 30mbar / 5mbar / 1mbar / 0.1mbar / 1.0×10-2mbar

*Atmospheric pressure type can be used only under the atomospheric condition
*3000 to 1Pa (22.5 to 7.5×10-3Torr,30 to 0.01mbar) types can be used under each pressure

Specification pressure

 

 

 

 

 

Vacuum type

Gas introduction type
(3000Pa ~1Pa type)

Manual bellows valve (2 systems: orifice line / direct line)
Mating flange / ICF070

Variable leak valve type

Sampling pressure

Power-supply voltage

AC100-240V

Atmospheric pressure type (Atmospheric pressure sampling unit)
APS-001

 

 

 

Capillary type (100,000Pa type)

 

 

 

Dry pump(Sweep)

6L/min, Ultimate pressure/6700Pa

Controller unit

Temperature contol and On/Off control of cartridge heater, On/Off control of sweep pump

Capillary tube unit

Manual bellows valve (1 line), Cartridge heater, insulation mat, Capillary tube (already mounted), Joint fitting 1/4 ”Swagelok

Power-supply voltage

Select for AC100V/220V

Pump unit desktop YTP

 

 

 

 

Desktop YTP
(YTP70A-D)

 

 

Turbo molecular pump

70L/s (N2)

Dry pump(Roughing)

19L/min(Diaphragm pump)

Power-supply voltage

AC100-240V

Accessories

AC100V power cord(*1), Base stage for DesktopYTP(*2), AC adapter for Qulee, LAN cable(3m) for Qulee, Software installation disc, Bolt set for fixing flange, Gasket (UFC114G,UFC070G), Power strip(*3), Casters(*4), Various fixing screws

Options

Ionization gauge package(SH2-1,Sensor head cable 2m, Cross tube, Bolts,Gaskets), USB-LAN adapter, Switching hub(8 ports or 16 ports)(*5),Floor cart(*6)

Note QULEE WITH YTP-H SERIES:

*1 Please use power code when using the device in a foreign country or a region where the electrical voltage differs from AC100V. Three power codes are necessary for atomospheric pressure sampling unit, desktop YTP, and AC adapter for Qulee.
*2 Make sure to use a base stage when installing desktop YTP. For atmospheric pressure type, it has two-stage structure so that a control unit can be attached.
*3 Power strip only comes with atmosperic pressure/AC100V type.
*4 Casters only come with atmospheric pressure type. Please attatch casters by yourself.
*5 AC adapter is necessary for an optional switching hub.
*6 Please set up the floor cart by yourself.
*7 Desktop YTP, Qulee main body, gas inlet, and other parts will be packaged separately. Please refer to the assembly manual for set up.