ULVAC Vietnam Representative Office

turbo molecular pump utm-mi series

Controller integrated turbo molecular pump with magnetic bearings saves wiring work and installation space.

Features

  • Controller integrated with the pump body: No wiring work between pump body and controller.
  • Free mounting direction:Free mounting direction makes the system design flexible.
  • 5 models from 1000L/s to 4000L/s class.
  • Wide range and high flow for the light processes.
  • Pump rotation variable from 25% to 100%: Enabling the pressure adjustment in a chamber.
  • High durability and safety:Safety confirmation tests are passed, such as air rushing-in test and touch down test.

applications

  • Main vacuum pumping system for equipment
    ・Semiconductor equipment
    ・Evaporator,Sputtering system
    ・Analytical equipment,Experimental device and etc.
  • Main vacuum pumping system for the light processes that do not generate side reaction products.
  • Replacement from oil diffusion pumps
  • General use for high vacuum evacuation system.

specifications

ModelUTM1200AUTM1600AUTM2300AUTM3400A
Inlet portVG150
ISO160F
VG200/VG250
ISO200F/ISO250F
VG250
ISO250F
VG300/VG350
ISO320F
Outlet portKF40
Ultimate pressure(*1)Pa10-7
Pumping speed (*2)(*3)N2L/s1030140021003200
ArL/s980133020003100
H2L/s66075013802100
Compression rateN22×108≧ 1×108≧ 1×109
He7×1035×1031×105
H28×1029×1026×103
Max inlet pressure(*4)Pa264.57
Max outlet pressure(*4)Pa266200270
Rotation speedmin-1372003370027600
Speed variationSpeed is variable between 25% and 100% of the rated speed.( set as 0.1%)
Start-up time≦ 8minutes≦ 9minutes≦ 16minutes
Mounting positionIn any desired direction
Surface treatment(*5)None
Commun icationContactD-sub 25 pin female Contact input and output signalD-sub 37 pin female Contact input and output signal
SerialSerial connecter RS232C/RS485D-sub 9 pin male RS232C/RS485
ControllerCompositionPump with integrated controller
Input electric powerSingle phase AC200 〜240V ±10%( 50/60Hz ±2Hz)
Max power0.75kVA1.2kVA
Cooling methodWater cooled
Cooling water(*6)Flow rateL/min3~4
PressureMPaG0.2 ~ 0.4
NoisedB(A)5760
Weightkg43415694
Recommended backing pump(*7)≧ 600L/min≧ 1500L/min
Applicable standardCE、TUVus
Standard accessoriesO-ring(Only VG)、Dust cap(Outlet port)、Remote-control Connector、Instruction manual(CD-ROM) 
Select partsAC CableAC Conector / AC Cable(5m/10m/15m/20m)
Special bolt for fixing pumpM10(Non-RoHS / RoHS)/ M12(Non-RoHS / RoHS)
Special bolt for fixing pumpNeed(M10)(*8)Not Need(*8)
OptionGas purge adaptor (KF10)

*1:digit number is expressed.
*2:Without a protective net.
*3:Calculated values:UTM2300A and UTM3400A 
*4:Max inlet pressure and Max outlet pressure cannot be satisfied at same time.
*5:Do not flow reactive gas and corrosive gas. Please contact us when using other gases.
*6:Not condensing 
*7:When evacuating 30SCCM 
*8:Grade of bolts,Fixing method and etc. are subject to various conditions. Please contact us for the detailed information.