Power supply dpg series
The DPG are 2kW-30kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.
The DPG-2/DPG-4 are 2 kW/4 kW DC power generators for sputtering. Repeatability is excellent because of high control accuracy.
Features
- High control precision
High precision of ±1% of set value even in a low power region of below 10％.</li - Wide accuracy guarantee
Guarantee the wide range power control from 1 to 100％. - Light-weight/space-saving
Light-weight and space-saving design with excellent installation flexibility. - Requires no cooling water
Forced air cooling, requires no cooling water. - High reliability
Our accumulated knowledge as an equipment manufacturer has been reflected in the design.
Applications
- Sputtering equipment for R&D
- BIAS power supply of sputtering equipment
Specifications
| Model | DPG-2 | DPG-4 | |
| Input specification | Rated input voltage | AC208V/220V | |
| Input voltage fluctuation range | 180 to 242VAC | ||
| Phase, frequency | Three phase, 50/60Hz | ||
| Input capacity | 3.5kVA | 6.2kVA | |
| Output specification | Maximum rated power | 2kW | 4Kw |
| Rated current | 5A | 10A | |
| Rated voltage | 800V | ||
| Output polarity | Negative polarity | ||
| Abnormal discharge control | Shutoff by inverter stop or stop by resonance | ||
| Control | Control method | Constant power control (P control) / Constant current control (I control) /Constant voltage control (V control) | |
| Control precision | ±1％ of set point (In our prescriptive resistance value.) | ||
| Control compensation range | Constant power control, 1 to 100％ of rated power value | ||
| Parallel operation | Nothing | ||
| Interface | Analog/Degital,RS-232C or RS-485 | ||
| Cooling method | Forced air-cooling | ||
| Dimension（W×D×H） | 241mm×610mm×133mm（excluding protrusions） | ||
| Weight | 15kg | ||
| Applicable standard | CE/SEMI F47/RoHS | ||
Ambient operating temperature 5℃ ～ 40℃（no condensation）
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.
The DPG-10/DPG-20 are 10kW/20kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.
Features
- Leight-weight/ Space-saving
Light-weight and space-saving design with excellent installation flexibility. - Selectable output voltage range
We feature a lineup with 800V specifications in addition 1000V specification. - Extensive arc handling
Extensive arc control methods familiar with plasma. - Requires no cooling water
Forced air cooling, require cooling water. - Can be equipped with a high-speed arc interruption circuit
Achieves low arc energy as standard. Can also be equipped with a high-speed arc shutoff circuit as an option. - Can be equipped with a flexible parallel operation function
DPG-10, DPG-20: With the optional parallel operation function, 10kW and 20kW can be combined to allow up to 12 units to work together in parallel operation. (240kW max)
Applications
- Flat panel display sputtering
- Semiconductor sputtering
- Touch panel sputtering
- Industrial coating sputtering
Specifications
| Model | DPG-10-AM | DPG-10H-AM | DPG-10-4AM | DPG-20-AM | DPG-20H-AM | DPG-20-4AM | |
| Input specification | Rated input voltage | 3-Phase 187 to 229VAC | 3-Phase AC342 to 440V | 3-Phase 187 to 229VAC | 3-Phase AC342 to 440V | ||
| Input capacity | 13.5kVA or less | 25kVA or less | |||||
| Output specification | Maximum rated power | 10kW | 20kW | ||||
| Rated current | 25A | 18A | 25A | 50A | 40A | 50A | |
| Rated voltage | -800V | -1000V | -800V | -800V | -1000V | -800V | |
| Ignition voltage | -1500V | ||||||
| Abnormal discharge control | Shutoff by inverter stop or high-speed arc shutoff circuit*1 when abnormal discharge is detected | ||||||
| Control | Control method | Constant power control (P control)/constant current control (I control)/constant voltage control (V control) | |||||
| Control precision | Constant power control (P Control)：±0.5% or less of the rated output or ±1％ of the set value, whichever is larger. Constant current control (I Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger. Constant voltage control (V Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger. | ||||||
| Control warranty scope | Constant power control, 10 to 100％ of rated power value | ||||||
| Extenal interface | analog/digital,RS-232C or 485 | ||||||
| Parallel operation | Up to 12units can be controlled by master/slave communication | ||||||
| Cooling method | Forced air-cooling | ||||||
| Dimension W×D×H | 483×630×133mm (excluding protrusions) | ||||||
| Weight | 29kg | 36kg | |||||
| Applicable standard | CE/ SEMI F47/ RoHS | ||||||
30 kW high impedance specification DC power supply for sputtering.
Features
- Extremely low ark energy by utilizing an optional high-speed arc shutoff circuit.
It contributes to high productivity and improves manufacturing yield. - 1200V output with high-impedance load resistance.
- EtherCAT communication is available.
Applications
- Sputtering equipment for FPD
- Sputtering equipment for Semiconductor
- Sputtering device for touch panel
- Sputtering equipment for coating industrial
Specifications
| Model | DPG-30H-44E | |
| Input specifications | Input voltage | 3 phase AC 396 to 484V |
| Input capacity | 41.5kVA or less | |
| Output specifications | Rated power | 30kW |
| Rated current | 55A | |
| Rated voltage | -1200V | |
| Ignition voltage | -1500V | |
| Abnormal discharge control | Stop the inverter or shutoff with high-speed arc shutoff circuit when abnormal discharge is detected | |
| Control | Control method | Rated power control (P Control ) Rated current control (I Control ) Rated voltage control (V Control ) |
| Control precision | P Control：Less than ±0.5％ of the rated output or ±1％ of the set value, whichever is larger. I Control：Less than ±1％ of the rated output or ±2％ of the set value, whichever is larger. V Control：Less than ±1％ of the rated output or ±2％ of the set value, whichever is larger. | |
| Control guarantee scope | 10 to 100％ of rated power value | |
| External interface | RS-232C or 485, EtherCAT | |
| Parallel operation | Maximum up to 12 units | |
| Cooling method | Forced air cooled | |
| Dimensions W×D×H | 483×650×177mm (excluding protrusions) | |
| Weight | 45kg | |
| Applicable standard | CE/ SEMI F47/ RoHS | |
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ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam
5/5/42 Thanh Binh Street, Hai Duong Province, Vietnam