Pendulum Valve VFR series

features

Due to ULVAC’s unique differential pressure mechanism the ULVAC VFR pendulum valve minimizes particles, valve wear, and vibration during normal operating conditions.
The valve casing is easily removed without removing the valve from vacuum system or pump. After removing the valve casing, the valve plate can be removed only picking a bolt, and the the valve is readily maintained.
The ULVAC VFR series valves can be installed anywhere in vacuum system. Free rotation and installment angle is flexible (360-degrees).

Large display manufacturing systems
OLED manufacturing systems
Other vacuum systems as main valve and gate valve
The valve casing is easily removed without removing the valve from vacuum system or pump. After removing the valve casing, the valve plate can be removed only picking a bolt, and the the valve is readily maintained.
The ULVAC VFR series valves can be installed anywhere in vacuum system. Free rotation and installment angle is flexible (360-degrees).

Model	VFR-400	VFR-500
Common port diameter	Φ400mm	Φ500mm
Flange specification (JIS B2290 equivalency)	VF400	VF500
Open/close specification	2 positions
Open/close operation principle	Pneumatic
Open/close time	8sec	12sec
Valve plate seal	Reverse pressure capable
Open conductance	50000L/s	90000L/s
Pressure range	1.0×10^-5Pa～0.12MPa(abs)
Allowable baking temperature （at stopped）	Valve body : < 120℃ Cylinder : < 80℃ Valve body : < 248F Cylinder : < 176F
Allowable ambient temperature	10 to 80℃ 50 to 176F
Allowable Gass temperature	10 to 80℃ 50 to 176F
Compressed air pressure	0.50 to 0.70MPaG 72.5 to 101.5psi 5.0 to 7.0bar
Compressed air supply port	Φ8 tube connection
Maintenance cycle	100,000
Mouting angle	Free
Main parts material	Valve body : AC4CH-T6 Seal plate : AC4CH-T6
Seal material	Vacuum side：FPM
Oil	Z300
Weight	98kg	155kg
Flange to flange dimension	150mm	170mm