Dry Etching System for Opto-Devices, MEMS NLD-5700
Production type dry etching system with ULVAC original NLD (Neutral Loop Discharge) Plasma Source.
Features
- ICP type etching chamber, CCP or Ashing chamber is also selectable as 2nd chamber.
- Low process pressure, high density plasma, low electron temperature are perfect for quartz glass, Pyrex, LN, LT etc.
- Good profile control and surface roughness.
- Good performance of deep SiO2 etching with PR.
- High etching rate of Quartz > 1μm/min, Pyrex > 0.8 μm/min.
- Excellent uniformity control.
applications
- Optical Devices (Wave guide, amplifier, optical switch etc), Micro lens, Photonics, μ-TAS etc.
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ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam
5/5/42 Thanh Binh Street, Hai Duong Province, Vietnam