ULVAC Vietnam Representative Office

vacuum equipments

ULVAC's base technology with vacuum technology at its core and related peripheral technologies have been combined through many years of R&D and improvements in manufacturing technology, enabling us now to deliver a very wide range of industrial manufacturing equipment for semiconductors, electronic parts, FPD, solar cells, and others.

Vacuum Furnace Sytem

ULVAC offers vacuum furnaces (for melting, thermal treatment, and CVD) used in general industrial fields and semiconductor/electronic device fields.

Vacuum Evaporation System

This equipment, employing vertical double door open mechanism is applied to deposit Al reflection film and superposition SIOx  protection film on the reflection board of automotive lighting parts and decoration. Perform film metallization on the PC,BMC,ABS metal materials.

Refrigerant Charging Machine

Charging Machine is a perfect solution for high for high accuracy and fast speed charging,integrating multiple advantaged and advanced technology.


Liquid Nitrogen Generator

With our Liquid Nitrogen Generators, you can “produce” your own liquid nitrogen (LN2) instead of purchasing, which offers great convenience, stable LN2 supply, and many other advantages. By connecting our Liquid Nitrogen Generator directly to your LN2-cooled cryogenic storage, continuous supply of LN2 will be made possible.

Automatic Helium Leak Testing System

ULVAC has leak detectors available not only for leak tests for vacuum systems but also for other applications ranging from packing package leak detection to the special detection of gas leaks.

Vacuum Roll Coater

Roll coaters are available for a variety of applications ranging from gold/silver thread coating to holographic coating for anti-counterfeiting and additionally flexible substrate coating.

Vacuum Distrillation System

Vacuum Distillation System ,Permitting distillation of highly heat-sensitive material (thermally decomposing / polymerizing substances) under vacuum at a low temperature and within a short time.

Vacuum Freeze Dry System

Vacuum Freeze Drying / Vacuum Drying System for low-volume production and research by the pharmaceutical industry require space-saving designs, low cost and high functionality. ULVAC has released the DFM Series to meet these demands.

Vacuum Cooling System

The application  of vacuum cooling  technology  has caused  a revolution in the green vegetables cold  chain  distribution system. In summer time, vegetables tend to deteriorate very fast after  harvest from  the field  under  high  temperature.

Vacuum Sputtering System

ULVAC’s sputtering systems have the best track record in the industry.

Ashing System

ULVAC offers environmentally-friendly (no solutions are needed), high-productivity technologies for resist removal, which is essential in production processes for electronic and semiconductor devices.

Etching System

ULVAC offers etching systems to meet every need for hard-to-etch materials, from those for new nonvolatile memory to compound semiconductors.

CVD System

ULVAC offers cluster-type and batch-type chemical vapor deposition systems and additionally offers systems specially designed for development, ranging from PE-CVD systems essential for a-Si and passive film deposition to metal CVD and thermal CVD systems.

Ion Implantation System

A high-performance ion implantation system series for semiconductor devices