ULVAC Vietnam Representative Office

Sputtering Coating Machine SPW Series

Roll coater for multilayer such as optical film and metal film on plastic Multylaer films can be formed at once by separating atmosphere between cambers.


  • Modulization design.
    Excellent atmosphere separation performance
  • Cathode type can be selected(Planar and rotary)

End Use

  • Wiring film for touch panel, transparent conductive film, invisible film, etc.
  • FPC electrode film


Target MaterialITO, Nb2O5, SiO2, Cu and Metal
Web MaterialPET, PI, PC, COP and Others
Web WidthMax300mmMax750mmMax1600mm
Number of Cathode88×n