ULVAC Vietnam Representative Office

Hot Roller Type Vacuum Heat Treatment Furnace FHHn series

FHH series are used for various purposes, such as tempering, sintering, brazing of various types of metal.

Features

  • Adopting hot roller carry system, chamber configuration can be multiplied by combining each unitized chambers.
  • System configuration is selectable depending on process and throughput, such as preparation chamber(vacuum/atmosphere),preheating chamber(operation 500ºC),heating chamber(operation 1150ºC), cooling chamber.
  • Adopting double gate valve, each chamber is completely isolated. A vacuum/atmosphere is completely isolated.
  • Units can be added depending on process and throughput.
  • Inline process is possible, as below.“Loading→Heating 1→Cooling 1→Heating 2→Cooling 2→Unloading”.
  • Adopting six sectional temperature control system heater(option), temperature uniformity can be 1150ºC±3ºC.
  •  

applications

  • Vacuum heat treatment : Heat treatment of various metals, brazing.
  • Sintering : Magnet.

specifications

System / Type306060906150Remarks
Performance
SizeUniform hot zone (㎜)Width300600600 
Length6009001500 
Height500600600 
Loading capacity (㎏)230500800including tray’s weight
TemperatureMax. temperaturePreheating600ºC 
Heating1200ºC 
Operation temperaturePreheating500ºC 
Heating1100ºC 
Temperature uniformityPreheating500±5ºCFive points measurement at no load
Heating1100±5ºC 
Heating (special)1100±3ºCHigh temperature
type is optional
CoolingGas coolingStandard80kPaGselectable Ar.N2
Pressurized type190kPaG
VacuumUltimate vacuumStandard10-1Pa orderAt degassed and empty conditions
High vacuum type10-3Paorder
Operation pressureStandard(1)1Pa〜10Pa(1) At low vacuum mode

 

 

 

 

(2)At carrier gas mode

Standard(2)10Pa to 100Pa
High vacuum type10-2Pa to10-1Pa
Pump-down time
(min)
Loading10min or lessfrom atmosphere to 10Pa or less at no load
Cooling10min or less
Cooling10min or less
Leak rate
(Pa・m3/s)
Loading4×10-4or lessby pressure rise method
Preheating4×10-4or less
Heating2×10-4or less
Cooling4×10-4or less
Utility
3chambers type
(Preheating×1 Heating×1 Cooling×1)
Power requirement (kVA)210300480Primary power requirement
Cooling water requirement (m3/hr)121518Temperature:20 to 30ºC
Compressed air requirement (Nm3/min)100011001100 
Carrier gas requirement (L/min)8080200Limit of flowmeter
Coling gas requirement (m3/times)4912At the condition of pressurized cooling (190kPa)
Floor space requirement (m2)Width8.51012 
Length8.51013
Height4.55.85.8
5chambers type
(Preheating×2 Heating×2 Cooling×1)
Power requirement (kVA)390425750Primary power requirement
Cooling waterrequirement (m3/hr)202530Temperature:20 to 30ºC
Compressed air requirement(Nm3/min)100011001100 
Carrier gas requirement (L/min)120160300Limit of flowmeter
Coling gas requirement (m3/times)4911.7At the condition of pressurized cooling (190kPa)
Floor space requirement (m2)Width8.51012 
Length11.512.517.5
Height4.55.85.8