ULVAC Vietnam Representative Office

Power supply dpg series

The DPG are 2kW-30kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.
  • Small Capacity DC Power Supply DPG-2 /DPG -4Series
  • Large Capacity DC Power Supply DPG-10/DPG-20 Series
  • Large Capacity DC Power Supply DPG-30 Series

The DPG-2/DPG-4 are 2 kW/4 kW DC power generators for sputtering. Repeatability is excellent because of high control accuracy.

Features

  • High control precision
    High precision of ±1% of set value even in a low power region of below 10%.</li
  • Wide accuracy guarantee
    Guarantee the wide range power control from 1 to 100%.
  • Light-weight/space-saving
    Light-weight and space-saving design with excellent installation flexibility.
  • Requires no cooling water
    Forced air cooling, requires no cooling water.
  • High reliability
    Our accumulated knowledge as an equipment manufacturer has been reflected in the design.

Applications

  • Sputtering equipment for R&D
  • BIAS power supply of sputtering equipment

Specifications

ModelDPG-2DPG-4
Input specificationRated input voltageAC208V/220V
Input voltage fluctuation range180 to 242VAC
Phase, frequencyThree phase, 50/60Hz
Input capacity3.5kVA6.2kVA
Output specificationMaximum rated power2kW4Kw
Rated current5A10A
Rated voltage800V
Output polarityNegative polarity
Abnormal discharge controlShutoff by inverter stop or stop by resonance
ControlControl methodConstant power control (P control) / Constant current control (I control) /Constant voltage control (V control)
Control precision±1% of set point (In our prescriptive resistance value.) 
Control compensation rangeConstant power control, 1 to 100% of rated power value
Parallel operationNothing
InterfaceAnalog/Degital,RS-232C or RS-485
Cooling methodForced air-cooling
Dimension(W×D×H)241mm×610mm×133mm(excluding protrusions)
Weight15kg
Applicable standardCE/SEMI F47/RoHS

Ambient operating temperature 5℃ ~ 40℃(no condensation)
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.

The DPG-10/DPG-20 are 10kW/20kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.

Features

  • Leight-weight/ Space-saving
    Light-weight and space-saving design with excellent installation flexibility.
  • Selectable output voltage range
    We feature a lineup with 800V specifications in addition 1000V specification.
  • Extensive arc handling
    Extensive arc control methods familiar with plasma.
  • Requires no cooling water
    Forced air cooling, require cooling water.
  • Can be equipped with a high-speed arc interruption circuit
    Achieves low arc energy as standard. Can also be equipped with a high-speed arc shutoff circuit as an option.
  • Can be equipped with a flexible parallel operation function
    DPG-10, DPG-20: With the optional parallel operation function, 10kW and 20kW can be combined to allow up to 12 units to work together in parallel operation. (240kW max)

Applications

  • Flat panel display sputtering
  • Semiconductor sputtering
  • Touch panel sputtering
  • Industrial coating sputtering

Specifications

ModelDPG-10-AMDPG-10H-AMDPG-10-4AMDPG-20-AMDPG-20H-AMDPG-20-4AM
Input specificationRated input voltage3-Phase 187 to 229VAC3-Phase AC342 to 440V3-Phase 187 to 229VAC3-Phase AC342 to 440V
Input capacity13.5kVA or less25kVA or less
Output specificationMaximum rated power10kW20kW
Rated current25A18A25A50A40A50A
Rated voltage-800V-1000V-800V-800V-1000V-800V
Ignition voltage-1500V
Abnormal discharge controlShutoff by inverter stop or high-speed arc shutoff circuit*1 when abnormal discharge is detected
ControlControl methodConstant power control (P control)/constant current control (I control)/constant voltage control (V control)
Control precisionConstant power control (P Control):±0.5% or less of the rated output or ±1% of the set value, whichever is larger.
Constant current control (I Control):±1% or less of the rated output or ±2% of the set value, whichever is larger.
Constant voltage control (V Control):±1% or less of the rated output or ±2% of the set value, whichever is larger.
Control warranty scopeConstant power control, 10 to 100% of rated power value
Extenal interfaceanalog/digital,RS-232C or 485
Parallel operationUp to 12units can be controlled by master/slave communication
Cooling methodForced air-cooling
Dimension W×D×H483×630×133mm (excluding protrusions)
Weight29kg36kg
Applicable standardCE/ SEMI F47/ RoHS

30 kW high impedance specification DC power supply for sputtering.

Features

  • Extremely low ark energy by utilizing an optional high-speed arc shutoff circuit.
    It contributes to high productivity and improves manufacturing yield.
  • 1200V output with high-impedance load resistance.
  • EtherCAT communication is available.

Applications

  • Sputtering equipment for FPD
  • Sputtering equipment for Semiconductor
  • Sputtering device for touch panel
  • Sputtering equipment for coating industrial

Specifications

ModelDPG-30H-44E
Input specificationsInput voltage3 phase AC 396 to 484V
Input capacity41.5kVA or less
Output specificationsRated power30kW
Rated current55A
Rated voltage-1200V
Ignition voltage-1500V
Abnormal discharge controlStop the inverter or shutoff with high-speed arc shutoff circuit when abnormal discharge is detected
ControlControl methodRated power control (P Control )
Rated current control (I Control )
Rated voltage control (V Control )
Control precisionP Control:Less than ±0.5% of the rated output or ±1% of the set value, whichever is larger.
I Control:Less than ±1% of the rated output or ±2% of the set value, whichever is larger.
V Control:Less than ±1% of the rated output or ±2% of the set value, whichever is larger.
Control guarantee scope10 to 100% of rated power value
External interfaceRS-232C or 485, EtherCAT
Parallel operationMaximum up to 12 units
Cooling methodForced air cooled
Dimensions W×D×H483×650×177mm (excluding protrusions)
Weight45kg
Applicable standardCE/ SEMI F47/ RoHS