ULVAC Vietnam Representative Office

Process gas monitor (RGA)

“Qulee” is ULVAC’s latest model for residual gas analysis and monitoring. The ULVAC Qulee achieves highly accurate measurements with high resolution even at a high pressure (1Pa) order the simple (easy) to use Qulee today.
  • CGM 2 Series
  • BGM 2 Series
  • HGM 2 Series
  • RGM 2 Series
  • YTP-H Series

Features

  • Ideal for process monitoring of various sputtering sysytem
  • No differential pumping system required (at 1Pa (7.5×10-3 Torr / 1×10-2 mbar) lower)
  • Integrated Display: No need for PC
  • Simple Operation: "One Click" function
  • Max 120℃ (248?) high temperature bake (250℃ (482?) when sensors are removed)
  • Electron bombard degas
  • Ion source and secondary electron multiplier protection maintenance help function
  • Traceability of analysis tube (patent pending)
  • Various Leak Tests are Available (Helium leak test, air leak test, built-up test)
  • Capable of total pressure measurement (ionization gauge)
  • Qulee QCS is Included:
    This software is included and compatible with (Windows 8/10)
  • QIP (Quick Install Package system) is Included:
    Auto measuring package (refer to options catalog for details)
  • Conforms with CE

Applications

  • Process monitoring for PV, FPD, and semiconductor system
  • Residual gas analysis in PVD system
  • Impurities (H2O, etc.) control in PVD system
  • For leak testing

Specifications

ModelCGM2-051CGM2-052
Mass filter typeQuadrupole
Mass range1 to 50 amu
ResolutionM/ΔM=1M (10% P.H.)
Detector typeFaraday cup (FC)EM Tube (SEM) / Faraday cup (FC)
Sensitivity10?? A/PaSEM:10?? A/Pa
1.33×10?? A/TorrSEM:1.33×10?? A/Torr
10?? A/mbarSEM:10?? A/mbar
Minimum detectable partial pressure1×10?? PaSEM:1×10-10 Pa
7.5×10-10 TorrSEM:7.5×10-13 Torr
1×10?? mbarSEM:1×10-12 mbar
Maximum operating pressureFC:2 Pa

FC:2, SEM:1×10?? Pa

FC:1.5×10?? TorrFC:1.5×10?? SEM:7.5×10?? Torr
FC:2×10?? mbarFC:2×10?? SEM:1×10?? mbar
Linearity1Pa
7.5×10?? Torr
1×10?? mbar
Filamentlr/Y?O?
Ionzing voltage40eV
Emission current0.1mA/0.4mA
DegasElectron bombard type 300V,5mA
Total pressure functionCapable
One Click functionCapable/He/H?O/N?/O?/Any gas
One Click leak test functionCapable
Power inputDC24V ±10% 50W
Weight(Sensor unit/sensor)2.1kg/0.44kg2.2kg/0.44kg
Maximum sensor operating temperature120℃(248?)

Maximum bakeout temperature

(electronics removed)

250℃(482?)
Operating temperature range10 to 40℃ (50 to 104?)
Operating humidity range15 to 80% (not condensing)
IP ratingIP30 (sensor unit)
Power connectorMSTB2.5/3-STF-5.08
Communication interfaceRS232C/RS485 (with option)
External input/output connectorD-sub15-pin (M2.6 screw)
Communication connectorRJ-45
External input/output signalAnalog input(0 to 10V)×2,External interlock input(pressure protection)×1,Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1
SoftwareQulee QCS Ver. 4.0 later (Windows 8/10)
Standard accessoriesPower connector,Communication cable(3m long),Software(install CD),Instruction manual(clean paper)

Optional accessories

(Cf. Qulee optional catalogue)

QIP(Auto-measuring package spec.),Communication cable(5m,10m,15m long),AC Power adapter,USB-LAN adapter,Swinting hub(8 ports or 16ports),Input / output connecter,Jacket heater,Carry case
Applicable standardCE

※When there is no RS232C port in PC,please purchase USB/RS232C micro converter of option.

※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.

Features

  • Excellent in Cost Performance
    Suitable for RGA application
  • Communication interface
    Ethernet compatible
  • Integrated Display
    No need for PC
  • Simple Operation
    "One Click" function
  • Bake Out
    Max 120℃ (248?) high temperature bake (250℃ (482?) when sensors are removed)
  • Degas Function
    Electron bombard degas
  • Protection and Maintenance Features
    Ion source and secondary electron multiplier protection maintenance help function
  • Various Leak Tests are Available
    Helium leak test, air leak test, leak up
  • Total Pressure Measurement
    Capable of total pressure measurement
  • Qulee QCS is Included
    This software is included and compatible with (Windows 7/8/10)
  • Applicable Standard
    Conforms with CE

Applications

  • Residual gas analysis for organic electro luminescence
  • Residual gas monitoring for PV, FPD, and semiconductor manufacturing system
  • Residual gas analysis in PVD system and vacuum deposition
  • Residual gas analysis for high vacuum pumping equipment, etc.
  • Residual gas analysis for freeze drying system
  • Various types of gas analysis for research and development

Specifications

Resolution M/△M=1M(10% P.H.)

ModelBGM2-101BGM2-201BGM2-102BGM2-202
Mass filter typeQuadrupole
Mass range1~100 amu1~200 amu1~100 amu1~200 amu
Detector typeFaraday cupEM tube
Faraday cup
Sensitivity10-7A/Pa4A/Pa
Minimum detectable partial pressure10-8Pa10-12Pa
Maximum operating pressure1x10-2Pa
Total pressure functionCapable/10-2 ~ 10-5Pa
One Click functionCapable /He/H2O/N2/O2/Any gas
One Click leak test functionCapable
Power inputDC24V±10% 50W
Maximum sensor operating temperature120℃ (248?)
Maximum bakeout temperature (electronics removed)250℃ (482?)
Operating temperature range10 to 40℃ (50 to 104?)
SoftwareQulee QCS Ver.4.0 later (Windows 7/8/10)
Applicable standardCE

ULVAC's new "Qulee HGM2" residual gas analyzer series with revolutionary simplicity of use.
Offers highest sensitivity of all models at 2.5 × 10 -6A/Pa, Qulee HGM2.
Can meet the needs of various R&D and other vacuum system proce ss monitoring.(Ethernet compatible)

Features

  • Most Appropriate for R&D Applications
    Offers highest sensitivity 2.5×10-6A/Pa (3.3×10-4A/Torr, 2.5×10-4A/mbar)
  • Communication interface Ethernet compatible
  • Integrated Display No need for PC
  • Simple Operation "One Click" function
  • Bake Out
    Max 250℃ (482?) high temperature bake (300℃ (572?) when the sensors are removed)
  • Degas Function Electron bombard degas
  • Maintenance
    Filament, ion source, and secondary electron multiplier are easy to replace
  • Protection and Maintenance Features
    Unit offers protection and maintenance of ion source and secondary electron multiplier Traceability of analysis tube (Japanese Patent No. 5016031)
  • Various Leak Tests are Available
    Helium leak test, air leak test, leak up
  • Total Pressure Measurement
    Capable of total pressure measurement (ionization gauge)
  • Qulee QCS is Included
    This software is included and compatible with (Windows 7/8/10)
  • Applicable Standard Conforms with CE

Applications

  • R&D such as thermal desorption gas analysis
  • Residual gas analysis for ultra-high vacuum pumping equipment, etc
  • Trace impurities in gas
  • R&D for photovoltaic field
  • Analysis of organic compound
  • Environmental measurements

Specifications


ModelHGM2-202HGM2-302
Mass filter typeQuadrupole
Mass range1 ~ 200 amu1 ~ 300 amu
ResolutionM/ ΔM=1M(10% P.H.)
Detector typeFaraday cupSEMFaraday cupSEM
Sensitivity2.5×10?? A/Pa4 A/Pa2.0×10?? A/Pa4 A/Pa
3.3×10?? A/Torr533 A/Torr3.3×10?? A/Torr533 A/Torr
2.5×10?? A/mbar400 A/mbar2.5×10?? A/mbar400 A/mbar

Minimum datectable partial pressure

Approx. 10?? PaApprox. 10-13PaApprox. 10?? PaApprox. 10-13Pa
Approx. 7.5×10-12 TorrApprox. 7.5×10-16 TorrApprox. 7.5×10-12 TorrApprox. 7.5×10-16 Torr
Approx. 1×10-11 mbarApprox. 1×10-12 mbarApprox. 1×10-11 mbarApprox. 1×10-12 mbar
Maximum operating pressure1×10??Pa
7.5×10?? Torr
1×10?? mbar
Filamentlr / Y?O?, 2pcs
Ionizing voltage25 ~ 70 eV(defalut:70eV)
Emission current0.1mA/0.5mA/1.0mA(default:0.5mA)
DEGASElectron bombard type 330V, 5mA
Total pressure functionCapable / 10?? ~ 10??Pa
"One Click" functionCapable / He/H?O/N?/O?/Any gas
"One Click" leak test functionCapable
Power inputDC24V±10% 50W
Weight(sensor unit / sensor)2.4kg/0.81kg
Maximum sensor operating temperature250℃(482?)

Maximum bakeout temperature

(elsectronisc removed)

300℃(572?)
Operating temperature range10 to 40℃(50 to 104?)
Operating humigity range15 ~ 80%(not condensing)
IP ratingIP30(sensor unit)
Power connectorMSTBV2.5/3-STF-5.08
Communication interfaceEthernet compatible
External input / output connectorD-sub15-pin (M2.6 screw)(eith option)
Communication connectorRJ45
External input / output signalAnalog input (0 to 10V)×2,External interlock input (pressure protection)×1,Error output ×1(FIL,SEM,RF,fault),Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1
SoftwareQulee QCS Ver.4.0 later (Windows 7/8/10)
Standard accessoriesPower connector,Communication cable (3m long),Software (install CD),Instruction manual (CD)

Option accessories

(cf. Qulee optional catalogue)

Communication cable (10,15,20,30,50m long), AC power adapter, USB-LAN adapter, Switing hub(8ports or 16ports), Input / output connector, Jacket heater, Carry case
Applicable standardCE

※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.

This process monitoring system has been developed for various kinds of applications such as etch, CVD and other reactive gas processes.
Using ULVAC's original ion source and pumping system enables you to achieve stable measurements results.

Features

  • Long term stable measurements results
  • Communication interface Ethernet compatible
  • Closed Ion Source Utilizing a Magnetic Field:
    Soft ionization provides less gas dissociation and higher sensitivity. Decomposition and adsorption due to thermal reactions are minimized in the ionization chamber.
  • Short distance between the process chamber and ion source allows quick-response of analysis.
  • Wide pressure range from 10-6 to 13kPa is available. (Choice of orifices)
  • No need for PC
  • "One Click" function
  • Max 120℃(248?) High temperature bakeing.
  • Electron bombard degas
  • Protection and maintenance of ion source and secondary electron multiplier
  • Traceability of analysis tube (patent pending)
  • Various Leak Tests are Available (Helium leak test, air leak test, leak up)
  • Capable of total pressure measurement (External ionization gauge GI-M2)
  • This software is included and compatible with (Windows 7/8/10)

Applications

  • For etching and CVD process
  • Monitoring reactive gases during process
  • End-point monitoring for etching and cleaning processes
  • Residual gas analyzing
  • Leak testing

Specifications

ModelRGM2-202RGM2-302
Sensor
Mass filter typeQuadrupole
Mass range1 to 200 amu1 to 300 amu
ResolutionM/△M=1M (10%P.H.)
Detector typeSEM/Faraday cup
Sensitivity1×10-3 A/Pa
1.33×10?? Torr
0.1A/mbar

minimum detectable partial pressure

(inside analyzer tube)

1×10-10 Pa
7.5×10-13 Torr
1×10-12 mbar
Ion sourceClosed ion source utilizing a magnetic field
FilamentIr/Y2O? coated V type, 1pc
Ionization voltage20 to 70 eV
Emission current10μA
DC amplification range

1×10-5 to 1×10-12 A

Maximum bakeout operating temperature120℃ (248?)
Differential pumping system
Gas inlet valueConductance value with 3 different gas inlet modes (VPC-070)
Max. sampling pressure13kPa
97.5Torr
130mbar
Differential pumping systemWith intermadiate port and gas purge port
Turbo molecular pump67L/s:N?
Fore pumpDIS090
Pirani vacuum gaugeSW1-1
Ionization vacuum gaugeGI-M2
WeightPumping system:57kg / Controller:38kg
Utility
Power supplyAC100V 15A
Compressed airDry N2:0.4 to 0.7MPa (Φ6 one-touch joint)
 Dry N2:3×10?? to 5.25×10?? Torr (Φ6 one-touch joint)
 Dry N2:4 to 7 mbar (Φ6 one-touch joint)
Control unit
"One Click" functionCapable / He/H2O/N2/O2/Any gas
External I/O and otherAnalog input×2 (0 to 10V)
Set-point output×2 (fault,alarm)
External interlock
Others
Baking heaterTape heater
StandStandard
Sensor unit (Control box cable)5m
InterfaceEthernet
SoftwareQulee QCS Ver.4.0 later(Windows 7/8/10)
OptionPC

 
A variation of Qulee, adding new features in response to customer needs.
By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for
process management and residual gas analysis.

Features

  • Excellent Cost Performance
    Provides gas analysis with an optional differentialpumping unit
  • Compact Design
    Utilizes standard vacuum unit model desktop YTP
  • Integrated Display Unit Design
    Provides visual data without need for a PC
  • Easy to Operate
    One-click function for easy operation, no complex procedures
  • Atmospheric Pressure Analysis
    Selectable maximum measurable pressures 3000Pa,500Pa,100Pa, 10Pa and 1Pa
    (22.5Torr, 3.75Torr, 0.75Torr, 7.5×10-2Torr and 7.5×10-3Torr/30mbar, 5mbar, 1mbar, 0.1mbar and 1.0×10-2mbar)
  • Select a Model Depending on your Application
    Select from the mass numbers 1 to 100 (BGM2-101/102), 1 to 200(BGM2-201/202), 1 to 300(HGM2-302)
  • Low noise
    43dB(A) or less at Ultimate pressure
  • Pressure indication
    Designed for easy integration of 2 vacuum gauges
  • Complete Leak Test Function
    Helium leak test, air leak test, leak up test
  • Qulee QCS Ver.4 (Ethernet compatible)
    Software included (Windows 7/8/10)

Applications

  • Various types of gas analysis for research and development
  • Gas monitoring of PVD system during processing
    Residual gas analysis in PVD system
  • Residual gas analysis for high vacuum pumping equipment, etc.

Specifications

Qulee main bodySelect from Qulee BGM2-101/102/201/202, HGM2-302
Max sampling pressureSelect from atmospheric pressure 3000Pa/500Pa/100Pa/10Pa/1Pa
Select from atmospheric pressure 22.5Torr/3.75Torr/0.75Torr/7.5×10??Torr/7.5×10??Torr
Select from atmospheric pressure 30mbar/5mbar/1mbar/0.1mbar/1.0×10??mbar
Gas induction (500 to 1Pa type/3.75 to 7.5×10??Torr type/5 to 1.0×10??mbar type)Manual bellows valve・Flange ICF070
Atmospheric pressure typePlease contact us for the detailed specification on separately.

Pump unit Desktop YTP

(YTP70A-D)

TMPPumping speed 70L/s(N?)
Dry pumpPumping speed 20L/min
Ultimate pressureBelow 10??Pa (7.5 × 10?? Torr, 1.0 × 10?? mbar) (value after TMP bale out)
Input voltageSingle phase AC100 ~ 240V, 300W
SoftwareQulee QCS Ver.4.0 (Windows 7/8/10)
Optional accessories

Ioniation gauge package (SH-1, Sensor head cable 2m,Cross tube,Bolts,Gaskets),Carry cart,USB-LAN adapter,Switching hub(8 ports or 16 ports)