Process gas monitor (RGA)
“Qulee” is ULVAC’s latest model for residual gas analysis and monitoring. The ULVAC Qulee achieves highly accurate measurements with high resolution even at a high pressure (1Pa) order the simple (easy) to use Qulee today.
Features
- Ideal for process monitoring of various sputtering sysytem
- No differential pumping system required (at 1Pa (7.5×10-3 Torr / 1×10-2 mbar) lower)
- Integrated Display: No need for PC
- Simple Operation: "One Click" function
- Max 120℃ (248?) high temperature bake (250℃ (482?) when sensors are removed)
- Electron bombard degas
- Ion source and secondary electron multiplier protection maintenance help function
- Traceability of analysis tube (patent pending)
- Various Leak Tests are Available (Helium leak test, air leak test, built-up test)
- Capable of total pressure measurement (ionization gauge)
- Qulee QCS is Included:
This software is included and compatible with (Windows 8/10) - QIP (Quick Install Package system) is Included:
Auto measuring package (refer to options catalog for details) - Conforms with CE
Applications
- Process monitoring for PV, FPD, and semiconductor system
- Residual gas analysis in PVD system
- Impurities (H2O, etc.) control in PVD system
- For leak testing
Specifications
| Model | CGM2-051 | CGM2-052 |
| Mass filter type | Quadrupole | |
| Mass range | 1 to 50 amu | |
| Resolution | M/ΔM=1M (10% P.H.) | |
| Detector type | Faraday cup (FC) | EM Tube (SEM) / Faraday cup (FC) |
| Sensitivity | 10?? A/Pa | SEM:10?? A/Pa |
| 1.33×10?? A/Torr | SEM:1.33×10?? A/Torr | |
| 10?? A/mbar | SEM:10?? A/mbar | |
| Minimum detectable partial pressure | 1×10?? Pa | SEM:1×10-10 Pa |
| 7.5×10-10 Torr | SEM:7.5×10-13 Torr | |
| 1×10?? mbar | SEM:1×10-12 mbar | |
| Maximum operating pressure | FC:2 Pa | FC:2, SEM:1×10?? Pa |
| FC:1.5×10?? Torr | FC:1.5×10?? SEM:7.5×10?? Torr | |
| FC:2×10?? mbar | FC:2×10?? SEM:1×10?? mbar | |
| Linearity | 1Pa | |
| 7.5×10?? Torr | ||
| 1×10?? mbar | ||
| Filament | lr/Y?O? | |
| Ionzing voltage | 40eV | |
| Emission current | 0.1mA/0.4mA | |
| Degas | Electron bombard type 300V,5mA | |
| Total pressure function | Capable | |
| One Click function | Capable/He/H?O/N?/O?/Any gas | |
| One Click leak test function | Capable | |
| Power input | DC24V ±10% 50W | |
| Weight(Sensor unit/sensor) | 2.1kg/0.44kg | 2.2kg/0.44kg |
| Maximum sensor operating temperature | 120℃(248?) | |
Maximum bakeout temperature (electronics removed) | 250℃(482?) | |
| Operating temperature range | 10 to 40℃ (50 to 104?) | |
| Operating humidity range | 15 to 80% (not condensing) | |
| IP rating | IP30 (sensor unit) | |
| Power connector | MSTB2.5/3-STF-5.08 | |
| Communication interface | RS232C/RS485 (with option) | |
| External input/output connector | D-sub15-pin (M2.6 screw) | |
| Communication connector | RJ-45 | |
| External input/output signal | Analog input(0 to 10V)×2,External interlock input(pressure protection)×1,Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1 | |
| Software | Qulee QCS Ver. 4.0 later (Windows 8/10) | |
| Standard accessories | Power connector,Communication cable(3m long),Software(install CD),Instruction manual(clean paper) | |
Optional accessories (Cf. Qulee optional catalogue) | QIP(Auto-measuring package spec.),Communication cable(5m,10m,15m long),AC Power adapter,USB-LAN adapter,Swinting hub(8 ports or 16ports),Input / output connecter,Jacket heater,Carry case | |
| Applicable standard | CE | |
※When there is no RS232C port in PC,please purchase USB/RS232C micro converter of option.
※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.
Features
- Excellent in Cost Performance
Suitable for RGA application - Communication interface
Ethernet compatible - Integrated Display
No need for PC - Simple Operation
"One Click" function - Bake Out
Max 120℃ (248?) high temperature bake (250℃ (482?) when sensors are removed) - Degas Function
Electron bombard degas - Protection and Maintenance Features
Ion source and secondary electron multiplier protection maintenance help function - Various Leak Tests are Available
Helium leak test, air leak test, leak up - Total Pressure Measurement
Capable of total pressure measurement - Qulee QCS is Included
This software is included and compatible with (Windows 7/8/10) - Applicable Standard
Conforms with CE
Applications
- Residual gas analysis for organic electro luminescence
- Residual gas monitoring for PV, FPD, and semiconductor manufacturing system
- Residual gas analysis in PVD system and vacuum deposition
- Residual gas analysis for high vacuum pumping equipment, etc.
- Residual gas analysis for freeze drying system
- Various types of gas analysis for research and development
Specifications
Resolution M/△M=1M(10% P.H.)
| Model | BGM2-101 | BGM2-201 | BGM2-102 | BGM2-202 |
| Mass filter type | Quadrupole | |||
| Mass range | 1～100 amu | 1～200 amu | 1～100 amu | 1～200 amu |
| Detector type | Faraday cup | EM tube Faraday cup | ||
| Sensitivity | 10-7A/Pa | 4A/Pa | ||
| Minimum detectable partial pressure | 10-8Pa | 10-12Pa | ||
| Maximum operating pressure | 1x10-2Pa | |||
| Total pressure function | Capable/10-2 ～ 10-5Pa | |||
| One Click function | Capable /He/H2O/N2/O2/Any gas | |||
| One Click leak test function | Capable | |||
| Power input | DC24V±10％ 50W | |||
| Maximum sensor operating temperature | 120℃ (248?) | |||
| Maximum bakeout temperature (electronics removed) | 250℃ (482?) | |||
| Operating temperature range | 10 to 40℃ (50 to 104?) | |||
| Software | Qulee QCS Ver.4.0 later (Windows 7/8/10) | |||
| Applicable standard | CE | |||
ULVAC's new "Qulee HGM2" residual gas analyzer series with revolutionary simplicity of use.
Offers highest sensitivity of all models at 2.5 × 10 -6A/Pa, Qulee HGM2.
Can meet the needs of various R&D and other vacuum system proce ss monitoring.(Ethernet compatible)
Features
- Most Appropriate for R&D Applications
Offers highest sensitivity 2.5×10-6A/Pa (3.3×10-4A/Torr, 2.5×10-4A/mbar） - Communication interface Ethernet compatible
- Integrated Display No need for PC
- Simple Operation "One Click" function
- Bake Out
Max 250℃ (482?) high temperature bake (300℃ (572?) when the sensors are removed) - Degas Function Electron bombard degas
- Maintenance
Filament, ion source, and secondary electron multiplier are easy to replace - Protection and Maintenance Features
Unit offers protection and maintenance of ion source and secondary electron multiplier Traceability of analysis tube (Japanese Patent No. 5016031) - Various Leak Tests are Available
Helium leak test, air leak test, leak up - Total Pressure Measurement
Capable of total pressure measurement (ionization gauge) - Qulee QCS is Included
This software is included and compatible with (Windows 7/8/10) - Applicable Standard Conforms with CE
Applications
- R&D such as thermal desorption gas analysis
- Residual gas analysis for ultra-high vacuum pumping equipment, etc
- Trace impurities in gas
- R&D for photovoltaic field
- Analysis of organic compound
- Environmental measurements
Specifications
| Model | HGM2-202 | HGM2-302 | ||
| Mass filter type | Quadrupole | |||
| Mass range | 1 ~ 200 amu | 1 ~ 300 amu | ||
| Resolution | M/ ΔM=1M(10% P.H.) | |||
| Detector type | Faraday cup | SEM | Faraday cup | SEM |
| Sensitivity | 2.5×10?? A/Pa | 4 A/Pa | 2.0×10?? A/Pa | 4 A/Pa |
| 3.3×10?? A/Torr | 533 A/Torr | 3.3×10?? A/Torr | 533 A/Torr | |
| 2.5×10?? A/mbar | 400 A/mbar | 2.5×10?? A/mbar | 400 A/mbar | |
Minimum datectable partial pressure | Approx. 10?? Pa | Approx. 10-13Pa | Approx. 10?? Pa | Approx. 10-13Pa |
| Approx. 7.5×10-12 Torr | Approx. 7.5×10-16 Torr | Approx. 7.5×10-12 Torr | Approx. 7.5×10-16 Torr | |
| Approx. 1×10-11 mbar | Approx. 1×10-12 mbar | Approx. 1×10-11 mbar | Approx. 1×10-12 mbar | |
| Maximum operating pressure | 1×10??Pa | |||
| 7.5×10?? Torr | ||||
| 1×10?? mbar | ||||
| Filament | lr / Y?O?, 2pcs | |||
| Ionizing voltage | 25 ~ 70 eV(defalut:70eV) | |||
| Emission current | 0.1mA/0.5mA/1.0mA(default:0.5mA) | |||
| DEGAS | Electron bombard type 330V, 5mA | |||
| Total pressure function | Capable / 10?? ~ 10??Pa | |||
| "One Click" function | Capable / He/H?O/N?/O?/Any gas | |||
| "One Click" leak test function | Capable | |||
| Power input | DC24V±10% 50W | |||
| Weight(sensor unit / sensor) | 2.4kg/0.81kg | |||
| Maximum sensor operating temperature | 250℃(482?) | |||
Maximum bakeout temperature (elsectronisc removed) | 300℃(572?) | |||
| Operating temperature range | 10 to 40℃(50 to 104?) | |||
| Operating humigity range | 15 ~ 80%(not condensing) | |||
| IP rating | IP30(sensor unit) | |||
| Power connector | MSTBV2.5/3-STF-5.08 | |||
| Communication interface | Ethernet compatible | |||
| External input / output connector | D-sub15-pin (M2.6 screw)(eith option) | |||
| Communication connector | RJ45 | |||
| External input / output signal | Analog input (0 to 10V)×2,External interlock input (pressure protection)×1,Error output ×1(FIL,SEM,RF,fault),Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1 | |||
| Software | Qulee QCS Ver.4.0 later (Windows 7/8/10) | |||
| Standard accessories | Power connector,Communication cable (3m long),Software (install CD),Instruction manual (CD) | |||
Option accessories (cf. Qulee optional catalogue) | Communication cable (10,15,20,30,50m long), AC power adapter, USB-LAN adapter, Switing hub(8ports or 16ports), Input / output connector, Jacket heater, Carry case | |||
| Applicable standard | CE | |||
※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.
This process monitoring system has been developed for various kinds of applications such as etch, CVD and other reactive gas processes.
Using ULVAC's original ion source and pumping system enables you to achieve stable measurements results.
Using ULVAC's original ion source and pumping system enables you to achieve stable measurements results.
Features
- Long term stable measurements results
- Communication interface Ethernet compatible
- Closed Ion Source Utilizing a Magnetic Field:
Soft ionization provides less gas dissociation and higher sensitivity. Decomposition and adsorption due to thermal reactions are minimized in the ionization chamber. - Short distance between the process chamber and ion source allows quick-response of analysis.
- Wide pressure range from 10-6 to 13kPa is available. (Choice of orifices)
- No need for PC
- "One Click" function
- Max 120℃(248?) High temperature bakeing.
- Electron bombard degas
- Protection and maintenance of ion source and secondary electron multiplier
- Traceability of analysis tube (patent pending)
- Various Leak Tests are Available (Helium leak test, air leak test, leak up)
- Capable of total pressure measurement (External ionization gauge GI-M2)
- This software is included and compatible with (Windows 7/8/10)
Applications
- For etching and CVD process
- Monitoring reactive gases during process
- End-point monitoring for etching and cleaning processes
- Residual gas analyzing
- Leak testing
Specifications
| Model | RGM2-202 | RGM2-302 |
| Sensor | ||
| Mass filter type | Quadrupole | |
| Mass range | 1 to 200 amu | 1 to 300 amu |
| Resolution | M/△M=1M (10%P.H.) | |
| Detector type | SEM/Faraday cup | |
| Sensitivity | 1×10-3 A/Pa | |
| 1.33×10?? Torr | ||
| 0.1A/mbar | ||
minimum detectable partial pressure (inside analyzer tube) | 1×10-10 Pa | |
| 7.5×10-13 Torr | ||
| 1×10-12 mbar | ||
| Ion source | Closed ion source utilizing a magnetic field | |
| Filament | Ir/Y2O? coated V type, 1pc | |
| Ionization voltage | 20 to 70 eV | |
| Emission current | 10μA | |
| DC amplification range | 1×10-5 to 1×10-12 A | |
| Maximum bakeout operating temperature | 120℃ (248?) | |
| Differential pumping system | ||
| Gas inlet value | Conductance value with 3 different gas inlet modes (VPC-070) | |
| Max. sampling pressure | 13kPa | |
| 97.5Torr | ||
| 130mbar | ||
| Differential pumping system | With intermadiate port and gas purge port | |
| Turbo molecular pump | 67L/s：N? | |
| Fore pump | DIS090 | |
| Pirani vacuum gauge | SW1-1 | |
| Ionization vacuum gauge | GI-M2 | |
| Weight | Pumping system：57kg / Controller：38kg | |
| Utility | ||
| Power supply | AC100V 15A | |
| Compressed air | Dry N2：0.4 to 0.7MPa (Φ6 one-touch joint) | |
| Dry N2：3×10?? to 5.25×10?? Torr (Φ6 one-touch joint) | ||
| Dry N2：4 to 7 mbar (Φ6 one-touch joint) | ||
| Control unit | ||
| "One Click" function | Capable / He/H2O/N2/O2/Any gas | |
| External I/O and other | Analog input×2 (0 to 10V) | |
| Set-point output×2 (fault,alarm) | ||
| External interlock | ||
| Others | ||
| Baking heater | Tape heater | |
| Stand | Standard | |
| Sensor unit (Control box cable) | 5m | |
| Interface | Ethernet | |
| Software | Qulee QCS Ver.4.0 later（Windows 7/8/10） | |
| Option | PC | |
A variation of Qulee, adding new features in response to customer needs.
By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for
process management and residual gas analysis.
By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for
process management and residual gas analysis.
Features
- Excellent Cost Performance
Provides gas analysis with an optional differentialpumping unit - Compact Design
Utilizes standard vacuum unit model desktop YTP - Integrated Display Unit Design
Provides visual data without need for a PC - Easy to Operate
One-click function for easy operation, no complex procedures - Atmospheric Pressure Analysis
Selectable maximum measurable pressures 3000Pa,500Pa,100Pa, 10Pa and 1Pa
(22.5Torr, 3.75Torr, 0.75Torr, 7.5×10-2Torr and 7.5×10-3Torr/30mbar, 5mbar, 1mbar, 0.1mbar and 1.0×10-2mbar) - Select a Model Depending on your Application
Select from the mass numbers 1 to 100 (BGM2-101/102), 1 to 200(BGM2-201/202), 1 to 300(HGM2-302) - Low noise
43dB(A) or less at Ultimate pressure - Pressure indication
Designed for easy integration of 2 vacuum gauges - Complete Leak Test Function
Helium leak test, air leak test, leak up test - Qulee QCS Ver.4 (Ethernet compatible)
Software included (Windows 7/8/10)
Applications
- Various types of gas analysis for research and development
- Gas monitoring of PVD system during processing
Residual gas analysis in PVD system - Residual gas analysis for high vacuum pumping equipment, etc.
Specifications
| Qulee main body | Select from Qulee BGM2-101/102/201/202, HGM2-302 | |
| Max sampling pressure | Select from atmospheric pressure 3000Pa/500Pa/100Pa/10Pa/1Pa | |
| Select from atmospheric pressure 22.5Torr/3.75Torr/0.75Torr/7.5×10??Torr/7.5×10??Torr | ||
| Select from atmospheric pressure 30mbar/5mbar/1mbar/0.1mbar/1.0×10??mbar | ||
| Gas induction (500 to 1Pa type/3.75 to 7.5×10??Torr type/5 to 1.0×10??mbar type) | Manual bellows valve・Flange ICF070 | |
| Atmospheric pressure type | Please contact us for the detailed specification on separately. | |
Pump unit Desktop YTP (YTP70A-D) | TMP | Pumping speed 70L/s(N?) |
| Dry pump | Pumping speed 20L/min | |
| Ultimate pressure | Below 10??Pa (7.5 × 10?? Torr, 1.0 × 10?? mbar) (value after TMP bale out) | |
| Input voltage | Single phase AC100 ~ 240V, 300W | |
| Software | Qulee QCS Ver.4.0 (Windows 7/8/10) | |
| Optional accessories | Ioniation gauge package (SH-1, Sensor head cable 2m,Cross tube,Bolts,Gaskets),Carry cart,USB-LAN adapter,Switching hub(8 ports or 16 ports) | |
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ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam