ULVAC Vietnam Representative Office

CRYO PUMP U-Series

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping. A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

  • Excellent pumping performance for a 4-inch cryopump
  • High pumping speed improves the pumping efficiency and productivity.
  • Ideal for sputtering process of semiconductor manufacturing, or other small scale equipments
  • Up to four units can be run by one compressor.
  • Customized design is available to fit your needs.

specifications

Model  U4H    U6HU8H / U8H-UU8HLU10HU12H U12HL
Pumping speeds(20degrees)NitrogenL/s4507501,7001,5002,4004,0004,000
Hydrogen5001,1002,7002,2003,6006,0006,800
Argon3706201,4001,2002,0003,3003,300
Water1,10021004,0004,0006,9009,5009,500
Ultimate pressurePa10-710-7(10-9)10-7(10-9)10-7(10-9)10-7(10-9)10-7(10-9)10-7(10-9)
Maximum throughputArgonPa・L/s1.3×1031.1×103(7.9)1.2×103(8.9)1.2×103(8.9)8.0×102(6.0)2.0×103(15)2.0×103(15)
Pumping capacityArgonPa・L1.0×1071.1×102(0.8)2.4×102(1.8)1.6×102(1.2)1.5×102(1.1)4.1×102(3.1)4.1×102(3.1)
Hydrogen1.5×1055.6×107(4.2×105)1.0×108(7.6×105)1.6×108(1.2×106)1.0×108(7.8×105)2.1×108(1.6×106)3.1×108(2.3×106)
Cooldown timemin(50/60Hz)45/503.1×105(2.3×103)1.0×106(7.6×103)1.2×106(9.0×103)6.7×105(5.0×103)9.8×105(7.4×103)9.8×105(7.4×103)
Weight of cryopumpKg14.51920.820294040

 

Model  U16U16PU20PU20HU22HU22PU22WBU30H
Pumping speeds(20degrees)NitrogenL/s5,0005,00010,00010,00017,00011,50013,00028,000
Hydrogen10,00010,00018,00018,00025,00014,00016,50043,000
Argon4,2004,2008,4008,40014,0009,70011,00023,000
Water16,00016,00029,00029,00039,00039,00039,00070,000
Ultimate pressurePa10-7(10-9)10-7(10-9)10-7(10-9)10-7(10-9)10-7(10-9)10-7(10-9)10-7(10-9)10-7(10-9)
Maximum throughputArgonPa・L/s1.4×103(11.0)1.6×103(12)1.1×103(8.7)1.7×103(12.8)4.1×103(31)1.7×103(12.8)3.5×103(26)2.7×103(20)
Pumping capacityArgonPa・L4.1×102(3.1)4.5×102(3.4)5.0×102(3.7)5.0×102(3.7)1.3×103(9.6)5.0×102(3.7)1.3×103(9.6)7.4×102(5.6)
Hydrogen4.3×108(3.3×106)4.3×108(3.3×106)5.8×108(4.4×106)5.8×108(4.4×106)8.1×108(6.1×106)5.8×108(4.4×106)8.1×108(6.1×106)7.8×108(5.9×106)
Cooldown timemin(50/60Hz)2.4×106(1.8×104)2.4×106(1.8×104)4.6×106(3.4×104)4.6×106(3.4×104)8.5×106(6.4×104)6.0×106(4.5×104)8.5×106(6.4×104)1.5×107(1.1×105)
Weight of cryopumpKg61616972125115125175

*Maintenance interval: every 16,000 hours