ULVAC Vietnam Representative Office

RF Power Supply with Maching box

RF power supply for plasma process with 13.56MHz, 0.5kW/1/kW/3kW/5kW output. Compact and lightweight by implementing a high efficiency RF amplifier. RF power supply has a built-in auto matching controller function, power control of the RF power supply and matching system control can be performed with the main unit alone.


  • Uses a high efficiency amplifier
    Energy savings through a construction with an RF circuit featuring good power conversion efficiency.
  • High speed auto matching
    Implements high speed auto matching with a high speed algorithm.
  • RF power generator internally equipped with an auto matching function
    Matching system control is possible with the power generator unit itself. Also capable of manual RF power generator and matching box operations with the internal controller.
  • Supports flexible control configurations
    Capable of external analog and serial communication control.
  • High reliability
    Our accumulated knowledge as an equipment manufacturer has been reflected in the design.


  • Sputtering and CVD
  • Plasma etching
  • RF ion source
  • Neutralizer


[Power generator]

Input SpecInput rated voltageAC200 to 220V
Input voltage fluctuation rangeAC180~242V
Phase, frequency1phase 50/60Hz3phase 50/60Hz
Input connectorBayonet netlock round connector
Bayonet netlock round connector
Input capacity1.2 kVA or less1.8 kVA or less5 kVA以 or less8 kVA or less
Input current10A or less25A or less30A or less
Leak current5mA or less
Output SpecOscillating frequency13.56MHz
Rated traveling-wave power500W(50Ω load)1000W(50Ω load)3000W(50Ω load)5000W(50Ω load)
Maximum reflected wave power100W500W
Output impedance50Ω
Harmonic distortion ratio-35dB or less (Rated output, Continuous mode)
Output connectorN typeHN typeDIN 7/16
ContControl methodPower control mode
Control precisionRated output ±2% or less(Rated power 10~100%)
Cooling methodAir-coolingWater-cooling
No cooling water requiredFlow rate 4L/minFlow rate 6L/min
Control guarantee rangeRated power 10 to 100%
Demensions W x D x H240mm x 495mm x 150mm
(excepting projection portion)
480mm × 500mm × 150mm
(excepting projection portion)

[Matching box]

RF inputInput frequency13.56MHz
Rated power10~500W10~1000W30~3000W50~5000W
Input connectorN typeHN typeDIN 7/16 type
RF outputAllowable output voltage2.5kVpp or less / 2.5kVdc or less5.0kVpp or less / 2.5kVdc or less10kVpp or less / 2.5kVdc or less
Allowable output current30A or less80A or less120A or less
Load impedanceReal part: 0.5Ω ≦ R ≦ 10.0Ω
(Only the range of regulation voltage and current)
Residual reflected wave powerBig either input travelling wave power 0.3% or less or 10W or lessBig either input travelling wave power 0.3% or less or 30W or lessBig either input travelling wave power 0.3% or less or 50W or less
Cooling systemAir-coolingAir-cooling + Water-cooling (Flow rate 2L/min)
Demensions W x D x H375mm x 250mm x 120mm(excepting projection portion)375mm x 250mm x 170mm
(excepting projection portion)
450mm x 500mm x 248mm
(excepting projection portion)
WeightApprox. 8kgApprox. 10kgApprox. 21kg

* Operating ambient temperature 10 to 40℃ (non condensing)
* Operating environment, direct sunlight, heat、dust, avoid a vibration, do not contain corrosive gas