The DPG-10/DPG-20 are 10kW/20kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.
As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications.
Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.
In the reactive sputtering processes, the A2K series abnormal discharge prevention unit applies positive voltage pulses to a DC power generator to neutralize the charge on the target.
MFU-20K is a unit which converts the DC output into bipolar pulse output, by adding to ULVAC DC power generator (DPG series). It contributes to improved productivity and throughput at low cost.
RF power supply for plasma process with 13.56MHz, 0.5kW/1/kW/3kW/5kW output. Compact and lightweight by implementing a high efficiency RF amplifier. RF power supply has a built-in auto matching controller function, power control of the RF power supply and matching system control can be performed with the main unit alone.