SMALL CAPACITY DC POWER SUPPLY DCS SERIES
As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications. Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.
Features
- Improvement in output regulation (Operates in 1％ to 100％ of rated)
- Wide range of output without tap changing
- Two types of arc detection function are equipped
- Countermeasure for extraneous noise by isolation (option)
- Selectable from three types of operation mode (power / current / voltage)
- Floating output up to +100V
applications
- For Al, Ni and other metal sputtering processes
specifications
| Model | DCS0052B | |
| Maximum output power | 500W | |
| Output range | Power | 5W～500W |
| Voltage | 80V～800V | |
| Current | 0.0012A～1.25A | |
| External dimensions (WDH) mm | 240 x 450 x 99 | |
| Weight | 9kg | |
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ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam
5/5/42 Thanh Binh Street, Hai Duong Province, Vietnam