As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications.
Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.
Improvement in output regulation (Operates in 1％ to 100％ of rated)
Wide range of output without tap changing
Two types of arc detection function are equipped
Countermeasure for extraneous noise by isolation (option)
Selectable from three types of operation mode (power / current / voltage)
Floating output up to +100V
For Al, Ni and other metal sputtering processes
Maximum output power
External dimensions (WDH) mm
240 x 450 x 99
ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam