Vacuum Gauge

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ULVAC vacuum gauges have been developed based on rich experience and technology in the vacuum field. From Pirani vacuum gauges to ionization vacuum gauges and ultra high vacuum gauges, in other words, from atmospheric pressure to ultra-high vacuum (10-12 Pa), we have a lineup of vacuum gauges for all industrial areas, measurement conditions, and applications.

Pirani vacuum gauge

SWU10-U SERIES

This is a pirani vacuum gauge which can measure degree of vacuum by connecting your smartphone directly with USB cable. No need for dedicated power supply and display.

SP1 Series

The sensor unit SP1 is an integrated pirani gauge consisting of the WP series sensor head and circuits, for the range of 3000 to 0.4Pa (22 to 3 x 10-3 torr/ 3 to 4 x 10-3mbar).

SW1 Series

This is a wide range pirani vaccum gauge which measures from atmospheric pressure to 5 x 10^-2 Pa. In addition, this gauge removes control and display panels from traditional controllers, keeping the minimum necessary functions only, thus saving cost and space.

GP-G Series

GP-1000G is a constant-temperature Pirani vacuum gauge that works using the thermal conduction of gas. Digital output and set point output are provided standard, as vacuum system control features. To enable effective use of system panels, GP-1000G has been given a more compact design.

GP-1000G Series

This series is a pirani vacuum gauge utilizing heat conduction of a gas.A platinum wire is used, therefore, the units will not break even at atmospheric pressure.The gauges have a wide range of applications and can easily measure pressures in the low vacuum range. Various types of interlocks and pumping sequence control are available within a set point.

Hot Cathode Gauge

ST200 Series

New series of transducer type “G-RTAN series Multi Ionization Gauge” that is capable of connection to differet type sensor heads.
This product, which is a triode type ionization gauge, is capable of longer life stable measurement in harsh environment for vacuum gauges because of low deterioration of sensitivity.
Improved to be more user-friendly taking over the concept of long-life and low running cost.

SH200 Series

New series of transducer type “G-RTAN series Multi Ionization Gauge” that is capable of connection to differet type sensor heads.
This product, which is a B-A type ionization vacuum gauge, can measure ultra-high vacuum.
Improved to be more user-friendly taking over the concept of wide-range measurement and low running cost.

GI Series

This series is hot cathode type ionization vacuum gauge, capable of measuring pressure in the 9.9 to 5 x 10-8 Pa (7.4 x 10-2 to 3.75 x10-10 Torr, 9.9 x 10-2 to 5 x 10-10 mbar)(Metal gauge, GI-M2), 6.7 x 10-1 to 10-6 Pa (5 x 10-3 to 9.75 x10-9 Torr, 6.7 x 10-3 to 1.3 x 10-8 mbar)(Glass gauge, GI-D7) range using triode tube or B-A type sensor heads

AxTran Series

AxTRAN is a hot cathode type ionization vacuum gauge with a Bessel Box type energy filter installed between the ion source and the ion collector. This design provides a measurement resolution of 0.5×10-10Pa by reducing the residual current due to soft X-rays and electron stimulated desorption (ESD) ions.

Cold Cathode Gauge

SC1 Series

G-TRAN series SC1 is a magnetron type cold cathode vacuum gauge.Since no filament is used, extended life between gauge replacement is assured. Maintenance is expected.Ease of maintenance reduces the cost of ownership.

Ceramic Capacitance Manometer

CCMT-D Series

The CCMT-D series is a capacitance manometer, which detects static electric capacitance occurring when a barrier membrane made of ceramic (alumina) is deformed by changes in gas pressure.

Display unit

ISG1 Series

This single channel vacuum gauge display is compatible with all G-TRAN series and CCM series sensors.
Enables users to view system status at a glance.