pirani vacuum gauge SP1 series
The sensor unit SP1 is an integrated pirani gauge consisting of the WP series sensor head and circuits, for the range of 3000 to 0.4Pa (22 to 3 x 10-3 torr/ 3 to 4 x 10-3mbar).
Features
- Transducer spec
If you don’t need a pressure display device:
・You can lower the costs associated with a vacuum gauge
・You can save space by minimizing the control panel - Replacing sensort heads is greatly simplyfied
- Corrosion-resistant platinum is used for the filament material
- You can use current sensor heads without modification. (SP1: WP-01, 02, 03, 16)
- Able to output 2 set points
- SP1: Pressure reading is a 0 to 5V output (non-linear)
- Able to operate at 24VDC power input
applications
- Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing.
- Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.
- Process control in the low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.
specifications
| Type | Sensor unit |
| Model | SP1 |
| Compatible sensor head | WP-01, WP-02, WP-03, WP-16 |
Accuracy
| ±15 %（51 Pa ～760 Pa） |
| ±30 %（10 Pa ～1000 Pa） | |
| ±50 %（0.4 Pa ～3000 Pa） | |
| Operating temperature range | 10 ~ 40℃ |
| Measurement value output | Nonlinear output: 0 to 5VDC (Max. 10V) |
| Setpoint 1/2 Pressure setting adjustment monitor | Nonlinear output: 0 to 5VDC (Max. 10V) |
| Control output signal | Open collector output, Negative logic |
| ERROR signal | |
| Setpoint 1/2 | |
| LED display | Power, error, set point 1, set point 2 |
| Power supply voltage | DC24V±2V, 90mA（Max.） |
| Input/Output connector | D-sub-15P（M2.6 screw） |
| Weight | 190g /0.41lb (Excluding sensor head) |
Standard accessories | Input/Output connector 1pc |
| Quick manual 1pc |
IO and analog GND are not isolated from the power GND.
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ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam