Dry Etching System for Production NE-5700/NE-7800

Home / product / Vacuum Equipments / Etching System / Dry Etching System for Production NE-5700/NE-7800

Dry etching system for high volume production with good cost performance and wide selection of tool configuration.

Features

In addition to ICP type chamber, NLD plasma etching chamber, Ashing chamber or CCP chamber can be selected.
Thanks to STAR Electrode (ULVAC Patent) and various temperature control functions, good process repeatability and stability can be achieved.
Low downtime thanks to simple maintenance structure.
Full process support from ULVAC Institute for Semiconductor and Electronics Technologies.

applications

Compound semiconductor (LED, LD and RF devices), Power devices (IGBT, SiC)
Metal, Dielectric, Polymer, Gate electrode etching
Ferro electric material, Noble metal etching
Ferro magnetic material etching

Follow us

Contact Us

ULVAC Vietnam Representative Office

29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam

0988-248-567

Find us on Google map

Privacy Overview

This website uses cookies to improve your experience while you navigate through the website. Out of these, the cookies that are categorized as necessary are stored on your browser as they are essential for the working of basic functionalities of the website. We also use third-party cookies that help us analyze and understand how you use this website. These cookies will be stored in your browser only with your consent. You also have the option to opt-out of these cookies. But opting out of some of these cookies may affect your browsing experience.

Necessary

Always Enabled

Necessary cookies are absolutely essential for the website to function properly. These cookies ensure basic functionalities and security features of the website, anonymously.

Cookie	Duration	Description
cookielawinfo-checkbox-analytics	11 months	This cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Analytics".
cookielawinfo-checkbox-functional	11 months	The cookie is set by GDPR cookie consent to record the user consent for the cookies in the category "Functional".
cookielawinfo-checkbox-necessary	11 months	This cookie is set by GDPR Cookie Consent plugin. The cookies is used to store the user consent for the cookies in the category "Necessary".
cookielawinfo-checkbox-others	11 months	This cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Other.
cookielawinfo-checkbox-performance	11 months	This cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Performance".
viewed_cookie_policy	11 months	The cookie is set by the GDPR Cookie Consent plugin and is used to store whether or not user has consented to the use of cookies. It does not store any personal data.