This tool, SOPHI-200/260, basically inherits exisiting medium current production model ion implanter, and remove over specification based on our sufficient experience as tool supplier. Therefore, thanks to effective cost reduction, we can offer inexpensive sales price with parallel scan capability.
Applicable for 5 – 8 inch wafers.
Compact and light weight tool.
Excellent parallel beam performance.
Excellent for engergy and metal contamination.
Applicable for ultra thin wafers.
Ultra thin wafers process such as power devices, etc.
ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam
5/5/42 Thanh Binh Street, Hai Duong Province, Vietnam