Ion Implantation System
SOPHI-30 Series
SOPHI-30, cluster type low-acceleration and high-density ion implanter, has no mass separator and supports thin wafers.
SOPHI-200/260 Series
This tool, SOPHI-200/260, basically inherits exisiting medium current production model ion implanter, and remove over specification based on our sufficient experience as tool supplier. Therefore, thanks to effective cost reduction, we can offer inexpensive sales price with parallel scan capability.
SOPHI-400 Series
SOPHI-400 is a cluster type, high-energy ion implanter applicable to 2400 keV.
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ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam
5/5/42 Thanh Binh Street, Hai Duong Province, Vietnam