High-temp Ion Implanter for SiC IH-860DSIC
Ion Implanter for mass production with high temp ESC for SiC.
Features
- Continuous high-temp implantation
- Up to 700keV
- Chain implantation by software
- Small footprint
- From R&D to mass production
applications
- SiC devices
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ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam
5/5/42 Thanh Binh Street, Hai Duong Province, Vietnam