High-temp Ion Implanter for SiC IH-860DSIC

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Ion Implanter for mass production with high temp ESC for SiC.

Features

Continuous high-temp implantation
Up to 700keV
Chain implantation by software
Small footprint
From R&D to mass production

applications

SiC devices

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ULVAC Vietnam Representative Office

29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam

0988-248-567

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