ULVAC Vietnam Representative Office

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Compact Sputter for Research & Development CS-L

HỆ THỐNG PHÚN XẠ LOẠI CỤM CS-L
It is possible to arrange for various module conbination; Atmospheric cassette, Single piece, Atmospheric transfer, Vaccum transfer. Compact design integrated with control unit.

Features

  • CS-L is suitable to various development testing. The system is controlled by the touch panel for the sputtering deposition, ultra high vacuum and substrate transfer.

applications

  • Reserch & development