ULVAC Vietnam Representative Office

Compact Sputter for Research & Development CS-L

It is possible to arrange for various module conbination; Atmospheric cassette, Single piece, Atmospheric transfer, Vaccum transfer. Compact design integrated with control unit.


  • CS-L is suitable to various development testing. The system is controlled by the touch panel for the sputtering deposition, ultra high vacuum and substrate transfer.


  • Reserch & development