Compact Sputter for Research & Development CS-L

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It is possible to arrange for various module conbination; Atmospheric cassette, Single piece, Atmospheric transfer, Vaccum transfer. Compact design integrated with control unit.

Features

CS-L is suitable to various development testing. The system is controlled by the touch panel for the sputtering deposition, ultra high vacuum and substrate transfer.

applications

Reserch & ｄevelopment