ULVAC Vietnam Representative Office

Holizontal In-line Type Sputtering System SCH Series

The SCH Series are horizontal in-line sputtering systems for deposition of transparent conductive films and other metal films. They can be used to depositi films such as back conatct and barrier layers in solar cell production lines.


  • Demonstrated high reliability in many mass-production lines
  • Flexibility in size and number of substrates
  • High deposition rate & high efficiency cathode
  • Applicable to a broad range of deposition methode (Depo-down/Depo-up, DC/AC/RF sputtering)
  • Simple and easy maintenance


  • Transparent conductive, back contact, precursor, buffer layer for solar cells