Batch-type Sputtering System SX Series
Batch-type Sputtering System SX series is for batch type sputtering system for research & development and small production application.
Features
- Auto control for vacuum pumping and deposition by PC
- Designed for co-sputtering method application (optional item by adding power supply)
- Logging data by PC
applications
- Reserch and development
- Small and medium production
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ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam
5/5/42 Thanh Binh Street, Hai Duong Province, Vietnam