ULVAC Vietnam Representative Office

Batch-type Sputtering System SX Series

Batch-type Sputtering System SX series is for batch type sputtering system for research & development and small production application.


  • Auto control for vacuum pumping and deposition by PC
  • Designed for co-sputtering method application (optional item by adding power supply)
  • Logging data by PC


  • Reserch and development
  • Small and medium production