ULVAC Vietnam Representative Office
ローラーハース式真空熱処理炉 FHHNシリーズ
FHHシリーズは、各種金属の焼戻し、焼結、ろう付けなど、多様な用途に適用可能です。
特長
- ローラーハース搬送方式を採用し、ユニット化された各室を組み合わせることで、室構成の拡張が可能です。
- 準備室（真空／大気）、予熱室（常用500℃）、加熱室（常用1150℃）、冷却室など、工程や処理量に応じて最適なシステム構成を選択できます。
- ダブルゲートバルブを採用することで各室を完全に独立させ、真空と大気雰囲気を完全に遮断します。
- 工程や処理量に応じて、後からユニットを追加することも可能です。
- 「装入 → 加熱1 → 冷却1 → 加熱2 → 冷却2 → 抽出」といったインライン処理が可能です。
- 6ゾーン温度制御システム（オプション）を採用し、1150℃にて±3℃の優れた温度均一性を実現します。
用途
真空熱処理： 各種金属の熱処理、ろう付け
焼結： 磁石
仕様
| System / Type | 3060 | 6090 | 6150 | Remarks | ||
| Performance | ||||||
| Size | Uniform hot zone (㎜) | Width | 300 | 600 | 600 | |
| Length | 600 | 900 | 1500 | |||
| Height | 500 | 600 | 600 | |||
| Loading capacity (㎏) | 230 | 500 | 800 | including tray’s weight | ||
| Temperature | Max. temperature | Preheating | 600ºC | |||
| Heating | 1200ºC | |||||
| Operation temperature | Preheating | 500ºC | ||||
| Heating | 1100ºC | |||||
| Temperature uniformity | Preheating | 500±5ºC | Five points measurement at no load | |||
| Heating | 1100±5ºC | |||||
| Heating (special) | 1100±3ºC | High temperature type is optional | ||||
| Cooling | Gas cooling | Standard | 80kPaG | selectable Ar.N2 | ||
| Pressurized type | 190kPaG | |||||
| Vacuum | Ultimate vacuum | Standard | 10-1Pa order | At degassed and empty conditions | ||
| High vacuum type | 10-3Paorder | |||||
| Operation pressure | Standard(1) | 1Pa〜10Pa | (1) At low vacuum mode
(2)At carrier gas mode | |||
| Standard(2) | 10Pa to 100Pa | |||||
| High vacuum type | 10-2Pa to10-1Pa | |||||
| Pump-down time (min) | Loading | 10min or less | from atmosphere to 10Pa or less at no load | |||
| Cooling | 10min or less | |||||
| Cooling | 10min or less | |||||
| Leak rate (Pa･m3/s) | Loading | 4×10-4or less | by pressure rise method | |||
| Preheating | 4×10-4or less | |||||
| Heating | 2×10-4or less | |||||
| Cooling | 4×10-4or less | |||||
| Utility | ||||||
| 3chambers type (Preheating×1 Heating×1 Cooling×1) | Power requirement (kVA) | 210 | 300 | 480 | Primary power requirement | |
| Cooling water requirement (m3/hr) | 12 | 15 | 18 | Temperature:20 to 30ºC | ||
| Compressed air requirement (Nm3/min) | 1000 | 1100 | 1100 | |||
| Carrier gas requirement (L/min) | 80 | 80 | 200 | Limit of flowmeter | ||
| Coling gas requirement (m3/times) | 4 | 9 | 12 | At the condition of pressurized cooling (190kPa) | ||
| Floor space requirement (m2) | Width | 8.5 | 10 | 12 | ||
| Length | 8.5 | 10 | 13 | |||
| Height | 4.5 | 5.8 | 5.8 | |||
| 5chambers type (Preheating×2 Heating×2 Cooling×1) | Power requirement (kVA) | 390 | 425 | 750 | Primary power requirement | |
| Cooling waterrequirement (m3/hr) | 20 | 25 | 30 | Temperature:20 to 30ºC | ||
| Compressed air requirement(Nm3/min) | 1000 | 1100 | 1100 | |||
| Carrier gas requirement (L/min) | 120 | 160 | 300 | Limit of flowmeter | ||
| Coling gas requirement (m3/times) | 4 | 9 | 11.7 | At the condition of pressurized cooling (190kPa) | ||
| Floor space requirement (m2) | Width | 8.5 | 10 | 12 | ||
| Length | 11.5 | 12.5 | 17.5 | |||
| Height | 4.5 | 5.8 | 5.8 | |||
