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真空コンポーネント

ドライ真空ポンプ

• Dry Vacuum Pump Dry-Vacuum-Pump-GR-Series
•  Dry Vacuum Pump LR:HR:UR Series
• Dry Vacuum Pump LS Series 
• Power-Saving Attachment ECO-SHOCK

油回転真空ポンプ

•  Oil Rotary Vacuum Pump VD Series Ver.C
•  Oil Rotary Vacuum Pump PKS Series
•  Oil Rotary Vacuum Pump PVD Series
•  Oil Rotary Vacuum Pump System YM-VD: YM-VS Series
•  Oil Rotary Vacuum Pump VS Series
•  Oil Mist Trap TMX-1  TM201  TM401  TM-2(F)  TM-3(F)  TM-4(F)  TM-4S
• Oil Rotary Vacuum Pump VDN Series
• Small Oil Rotary Vacuum Pump GLD-N Series
• Single-stage Oil Rotary Vacuum Pump VSO Series
• Single-stage Oil Piston Vacuum Pump PSO Series
• Screw Dry Pump SCO Series
• Roots Booster Pump RBO Series
• Double-stage Oil Piston Vacuum Pump PDO Series
• Oil Mist Separator OSY Series

メカニカルブースターポンプ

• Mechanical Booster Pump PRC-A:PMB-C(M) Series
• Mechanical Booster Pump PMB Series Ver. D
• Mechanical Booster Pump NB Series 

ターボ分子ポンプ

• Turbo Molecular Pump Unit YTP Series
• Turbo Molecular Pumping System Desktop YTP
• Turbo Molecular Pump UTM Series
•  Turbo Molecular Pump UTM-FH:FW Series

油拡散ポンプ

•  Oil Diffusion Pump ULK:PFL:PBL Series

クライオポンプ

•  Cryo Pump U – Series

真空バルブ

•  Vacuum Angle Valve VLP:VLB:VLH
•  Large Pendulum Valve VFR Series

真空計

•  1CH Display Unit ISG1
•  4CH Display Unit IM1R1:IM2R1
•  Multi Ionization Gauge ST2-1/ST2-2
•  Atmospheric Pirani Gauge Combo SW1&ISG1 Package
•  Atmosphric Pirani Gauge SW1-1:SW1-2
•  Cold Cathode Ion Gauge Sensor Unit SC1
•  Hot Cathode Gauge Box Unit BMR2
•  Multi Ionization Gauge SH2-1:SH2-2
•  Multi Ionization Gauge ST2-1:ST2-2
•  Pirani Gauge Sensor Box Unit BPR2
•  Pirani Gauge Sensor Unit SP1
•  Ceramic Capacitance Manometer CCMT-D Series
•  Extreme High Vacuum Gauge AxTRAN
•  Ionization Vacuum Gauge GI-M2:GI-D7
•  Ionization Vacuum Gauge GI-TL3:GI-TL3RY:GI-D7
•  Penning Gauge GI-PA:GI-PARY
•  Pirani Vacuum Gauge GP-G Series
• Smartphone – Direct Pirani Vacuum Gauge SWU-10U

ヘリウムリークディテクタ（HELIOTシリーズ

•  Leak Detector HELIOT 900
•  Leak Detector HELIOT ZERO

プロセスガスモニタ

•  Basic Process Gas Monitor Qulee BGM Series
•  Compact Process Gas Monitor Qulee CGM Series
•  High Performance Process Gas Monitor Qulee HGM Series
•  Quadurupole Mass Spectrometer with Differential Pumping Kit Qulee with YTP
•  Reactive Process Gas Monitoring System Qulee RGM-202:RGM-302
•  Software for Gas Analysis Qulee QCS
•  Qulee Series Option Catalog

高真空部品

•  UFC Series Ultra-High Vacuum Flanges
•  Ultra-High Vacuum CMS Series:TDU Series:TSU Series

電源装置

•  Active Arc Killer A2K Series
•  Bipolar unit for dual cathode MFU-20K
•  EB Gun for Metal Evaporation EGN Series
•  EB Gun for Optical Evaporation EGP-1G
•  EB Power Generator HPS-N Series
•  EB power supply HPS series
•  Pulsed DC Power generator
•  RF Power Supply RFS-N Series

小型真空ポンプ

•  Small Vacuum Pump

油水分離装置・オイルクリーナー

• Oil Water Separator & Oil Cleaner 

装置

自動ヘリウムリーク試験システム

•  Auto Leak Testing System
• Helium Leak Test Application for Power Battery  New Energy Vehicle Thermal Management 

オンラインヘリウム充填・回収リーク試験システム

• Online Helium Charging & Recovery Leak Testing System

 真空コーティングシステム

•  Vacuum Coating System

メタライゼーション真空成膜装置 

•  Metallization Vacuum Coating Machine (Roll Coater)
•  Vacuum Furnace System
• Vacuum Heat Treatment Furnace System

 冷媒充填装置

• Refrigerant Charging Machine 

 真空冷却システム

•  Vacuum Cooling System

 真空蒸留システム

•  Vacuum Distillation System

 液体窒素発生装置（LN₂)

•  Liquid Nitrogen Generator (LN2)

メタライゼーション真空成膜装置（ロールコーター）EWA 

• Metalization Vacuum Coating Machine (Roll Coater) EWA