Cluster-type Sputtrering System SME-200E
SME-200E is cluster type Sputtering system for research and development and production purpose.
Features
- Substrate size up to Φ200mm.
- Process chamber up to three process chamber can be equipped.
- Available for various application-specific process modules.
- Substrate heating mechanism, simultaneous deposition and revolved deposition are available.
applications
- R&D
- Production purpose
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ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam
5/5/42 Thanh Binh Street, Hai Duong Province, Vietnam