Compact Sputter for Research & Development CS-L
It is possible to arrange for various module conbination; Atmospheric cassette, Single piece, Atmospheric transfer, Vaccum transfer. Compact design integrated with control unit.
Features
- CS-L is suitable to various development testing. The system is controlled by the touch panel for the sputtering deposition, ultra high vacuum and substrate transfer.
applications
- Reserch & ｄevelopment
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ULVAC Vietnam Representative Office
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District Ho Chi Minh City, Vietnam
5/5/42 Thanh Binh Street, Hai Duong Province, Vietnam