The SMD Series are single-substrate sputtering systems for deposition of films such as metal films and ITO films. ULVAC has delivered a large number of these systems, for use in a wide range of production environments. ULVAC responds rapidly to feedback from production sites to improve the reliability of these models.
Features
Substrate-only transfer and side deposition method enable low particle generation.
Space-saving design
Individual substrates can easily be managed using parameters such as deposition conditions.
Different cathodes are available for deposition of different substances.
Wide range of deposition processes are supported, based on ULVAC’s abundant experience and data.