pirani vacuum gauge SP1 series

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Features

Transducer spec
If you don’t need a pressure display device:
・You can lower the costs associated with a vacuum gauge
・You can save space by minimizing the control panel
Replacing sensort heads is greatly simplyfied
Corrosion-resistant platinum is used for the filament material
You can use current sensor heads without modification. (SP1: WP-01, 02, 03, 16)
Able to output 2 set points
SP1: Pressure reading is a 0 to 5V output　(non-linear)
Able to operate at 24VDC power input

Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing.
Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.
Process control in the low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.

Type	Sensor unit
Model	SP1
Compatible sensor head	WP-01, WP-02, WP-03, WP-16
Accuracy	±15 %（51 Pa ～760 Pa）
	±30 %（10 Pa ～1000 Pa）
	±50 %（0.4 Pa ～3000 Pa）
Operating temperature range	10 ~ 40℃
Measurement value output	Nonlinear output: 0 to 5VDC (Max. 10V)
Setpoint 1/2 Pressure setting adjustment monitor	Nonlinear output: 0 to 5VDC (Max. 10V)
Control output signal	Open collector output, Negative logic
	ERROR signal
	Setpoint 1/2
LED display	Power, error, set point 1, set point 2
Power supply voltage	DC24V±2V, 90mA（Max.）
Input/Output connector	D-sub-15P（M2.6 screw）
Weight	190g /0.41lb (Excluding sensor head)
Standard accessories	Input/Output connector 1pc
Standard accessories	Quick manual 1pc

IO and analog GND are not isolated from the power GND.