C Type : Clean process (LS***A-C)
Feature : Low power consumption model (with built-in ECO-SHOCK)
Applications : For clean process such as air and N2
Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc.
L Type : Light process (LS***A-L)
Features : Light process model (with surface treatment and purge function)
Applications : For light process such as steam and volatile liquid medicine
Vacuum drying / Freeze drying / Ashing / General industrial use etc.