ULVAC Vietnam Representative Office

Dry Vacuum Pump LS Series

High pumping speed and Low power consumption. Model is selectable with the optimum pumping speed according to the application.


  • High efficiency (IE3) multiple voltage motor fully developed by ULVAC
    A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V.
  • Forced oil circulation system
    Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum.
  • Various options are available for special application
    3 types, type A, B and H, are available in addition to standard type for special application.


  • C Type : Clean process (LS***A-C)
       Feature : Low power consumption model (with built-in ECO-SHOCK)
       Applications : For clean process such as air and N2
               Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc.

     L Type : Light process (LS***A-L)
       Features : Light process model (with surface treatment and purge function)
       Applications : For light process such as steam and volatile liquid medicine
              Vacuum drying / Freeze drying / Ashing / General industrial use etc.